Ibyiza bya silindrike na planar magnetron gusohora intego

Umujyanama wa tekiniki wa RSM azagusangiza ibyiza bya silindrike na planar magnetron yohereza intego? Ugereranije nizindi ntego za magnetron zitera, intego ya silindrike na planar ya magnetron igumya kugumana ibyiza byo gutwikira neza guhuza intego zurukiramende, kandi birashobora gukoresha cyane intego ukoresheje inzira ebyiri zikurikira:

. bitigeze byangirika birashobora gukoreshwa;

. Muri iki gihe, intego izakoreshwa neza, kandi igipimo cyo gukoresha intego kirashobora kugera kuri 50% ~ 60% Iyo ibikoresho bigenewe ari ibyuma byagaciro, ibi biragaragara ko bifite akamaro kanini.

Ukoresheje ihame rya magneti hamwe ninkweto za pole muri coaxial silindrical magnetron sputtering intego kugirango ukemure ikibazo cyumurima wa magnetiki wanyuma, intego yindege yurukiramende irashobora guhinduka intego ya silindrike na planar magnetron itera, Intego irashobora kugabanya igipimo cyo gukoresha intego. mugihe ugumya guhuza neza guhuza indege yurukiramende Kugirango uzamure inyungu zubukungu.