Tungsten Silicide Zigawo

Tungsten silicide WSi2 imagwiritsidwa ntchito ngati chinthu chodzidzimutsa chamagetsi mu ma microelectronics, kutchingira mawaya a polysilicon, zokutira zotsutsa-oxidation ndi zokutira waya zokana. Silicide ya Tungsten imagwiritsidwa ntchito ngati cholumikizira mu ma microelectronics, okhala ndi resistivity ya 60-80μΩcm. Amapangidwa pa 1000 ° C. Nthawi zambiri amagwiritsidwa ntchito ngati shunt kwa mizere ya polysilicon kuti awonjezere kuwongolera kwake ndikuwonjezera liwiro la chizindikiro. Tungsten Silicide wosanjikiza imatha kukonzedwa ndi kuyika kwa nthunzi wamankhwala, monga kuyika kwa nthunzi. Gwiritsani ntchito monosilane kapena dichlorosilane ndi tungsten hexafluoride ngati mpweya wamafuta. Filimu yoyikidwayi si ya stoichiometric ndipo imafuna annealing kuti isinthe kukhala mawonekedwe a stoichiometric.

Tungsten silicide ikhoza kulowa m'malo mwa filimu yakale ya tungsten. Tungsten silicide imagwiritsidwanso ntchito ngati chotchinga pakati pa silicon ndi zitsulo zina.

Silicide ya Tungsten ndiyofunikanso kwambiri m'makina a microelectromechanical, omwe ma tungsten silicide amagwiritsidwa ntchito makamaka ngati filimu yopyapyala yopanga ma microcircuits. Pachifukwa ichi, filimu ya tungsten silicide ikhoza kukhala plasma-etched pogwiritsa ntchito, mwachitsanzo, silicide.

Rich Special Materials amagwira ntchito yopanga Sputtering Target ndipo amatha kupanga Tungsten Silicide.zidutswamalinga ndi makonda a Makasitomala. Kuti mudziwe zambiri, chonde titumizireni.