1, Kukonzekera kwa sputtering
Ndikofunikira kwambiri kusunga chipinda chounikira, makamaka chotsukira choyera. Zotsalira zilizonse zopangidwa ndi mafuta odzola, fumbi ndi zokutira zam'mbuyomu zimasonkhanitsa nthunzi yamadzi ndi zoipitsa zina, zomwe zidzakhudza mwachindunji digiri ya vacuum ndikuwonjezera kuthekera kwa kulephera kupanga filimu. Kuzungulira kwachidule kapena chandamale chandamale, filimu yovuta kwambiri komanso zonyansa zochulukira za mankhwala nthawi zambiri zimayamba chifukwa cha chipinda chopondera chodetsedwa, mfuti yolavula ndi chandamale. Pofuna kutsatira mawonekedwe a zokutira, ndikofunikira kuyeretsa ndikuwumitsa mpweya wotulutsa (argon kapena oxygen). Pambuyo pa gawo lapansi loyika m'chipinda cha sputtering, mpweya umayenera kuchotsedwa kuti ufikire mpweya wofunikira ndi ndondomekoyi. Chophimba chotchinga m'dera lamdima, khoma lamkati ndi malo oyandikana nawo ayenera kukhala oyera. Pamene kuyeretsa chipinda vakuyumu, ife kulimbikitsa ntchito galasi mpira kuwombera kuphulika kuchitira fumbi mbali, pamodzi ndi wothinikizidwa mpweya kuchotsa oyambirira sputtering zotsalira kuzungulira chipinda, ndiyeno mwakachetechete kupukuta kunja pamwamba ndi aluminiyamu impregnated sandpaper. Pambuyo kupukuta pepala lopyapyala, limatsukidwa ndi mowa, acetone ndi madzi a deionized. Pamodzi, imalimbikitsa kugwiritsa ntchito vacuum vacuum cleaner pothandizira kuyeretsa. Zolinga zopangidwa ndi zitsulo za Gaozhan zimadzaza m'matumba apulasitiki otsekedwa ndi vacuum,
Zomangidwa muzothandizira kuthandizira chinyezi. Mukamagwiritsa ntchito chandamale, chonde musakhudze chandamalecho ndi dzanja lanu. Zindikirani: mukamagwiritsa ntchito chandamale, chonde valani magolovesi oyeretsa komanso opanda zingwe. Musakhudze chandamalecho ndi manja anu
2, Kuyeretsa chandamale
Cholinga choyeretsa chandamale ndikuchotsa fumbi kapena dothi lomwe lingakhalepo pamtunda wa chandamale.
Chandamale chachitsulo chikhoza kutsukidwa munjira zinayi,
Gawo loyamba ndikutsuka ndi nsalu yofewa yopanda lint yoviikidwa mu acetone;
Gawo lachiwiri likufanana ndi sitepe yoyamba, kuyeretsa ndi mowa;
Khwerero 3: yeretsani ndi madzi a deionized. Pambuyo kutsuka ndi madzi osakaniza, ikani chandamale mu uvuni ndikuwumitsa pa 100 ℃ kwa mphindi 30.
Kuyeretsa kwa oxide ndi mikombero ya ceramic kudzachitika ndi "nsalu zaulere".
Gawo lachinayi ndikutsuka chandamale ndi argon ndi kuthamanga kwambiri komanso mpweya wochepa wamadzi mutachotsa malo afumbi, kuti muchotse tinthu tating'onoting'ono tomwe titha kupanga arc mu dongosolo la sputtering.
3, Chandamale chipangizo
Pakuyika chandamale, njira zodzitetezera za Z ndikuwonetsetsa kulumikizana kwabwino kwa kutentha kwapakati pa chandamale ndi khoma loziziritsa lamfuti yolapa. Ngati warpage ya ndodo yozizira kwambiri kapena warpage ya mbale yakumbuyo ndi yoopsa, chipangizo chandamale chidzasweka kapena kupindika, ndipo matenthedwe a matenthedwe kuchokera ku chandamale kumbuyo kwa chandamale adzakhudzidwa kwambiri, zomwe zimabweretsa kulephera kwa kutentha. pakulavula, ndipo chandamalecho chidzasweka kapena kuphonya
Pofuna kuonetsetsa kuti matenthedwe matenthedwe, wosanjikiza pepala graphite akhoza padded pakati pa cathode kuzirala khoma ndi chandamale. Chonde tcherani khutu kuti muyang'ane mosamala ndikuwonetsetsa kukhazikika kwa khoma loziziritsa lamfuti ya sputtering yomwe imagwiritsidwa ntchito kuti muwonetsetse kuti O-ring nthawi zonse imakhalapo.
Popeza ukhondo wa madzi ozizira omwe amagwiritsidwa ntchito komanso fumbi lomwe lingathe kuchitika panthawi yogwiritsira ntchito zipangizozo lidzayikidwa mu thanki yamadzi ozizira a cathode, m'pofunika kuyang'ana ndi kuyeretsa thanki lamadzi ozizira la cathode pamene mukuyika chandamale kuti muwonetsetse kuti yosalala. kuzungulira kwa madzi ozizira ndi kuti polowera ndi potulukira sizidzatsekedwa.
Ma cathode ena amakonzedwa kuti akhale ndi malo ang'onoang'ono ndi anode, kotero pakuyika chandamale, pamafunika kuonetsetsa kuti palibe kukhudza kapena conductor pakati pa cathode ndi anode, mwinamwake dera lalifupi lidzachitika.
Onani Bukhu la wogwiritsa ntchito zida kuti mumve zambiri za momwe mungagwiritsire ntchito bwino zomwe mukufuna. Ngati palibe chidziwitso chotere m'mabuku ogwiritsira ntchito, chonde yesani kukhazikitsa chipangizocho molingana ndi malingaliro oyenera operekedwa ndi chitsulo cha Gaozhan. Mukamangitsa bawuti imodzi ndi dzanja, choyamba limbitsani bawuti ina pa diagonal ndi dzanja. Bwerezani izi mpaka ma bolts onse pa chipangizocho atsekedwa, ndiyeno limbitsani ndi chinachake.
4. Kuwunika kwafupipafupi ndi kulimba
Pambuyo pomaliza chipangizo chandamale, ndikofunikira kuyang'ana dera lalifupi komanso kulimba kwa cathode yonse,
Akufuna kudziwa ngati pali dera lalifupi mu cathode pogwiritsa ntchito mita yotsutsa
Tsankho la mizere. Pambuyo potsimikizira kuti palibe dera lalifupi mu cathode, kufufuza kwamadzi kungathe kuchitidwa, ndipo madzi akhoza kulowetsedwa mu cathode kuti atsimikizire ngati pali kutuluka kwa madzi.
5, Target pre sputtering
Target pre sputtering imalimbikitsa sputtering ya argon, yomwe imatha kuyeretsa pamwamba pa chandamale. Pamene chandamale chikayimitsidwa, chimalimbikitsidwa kuti chiwonjezeke pang'onopang'ono mphamvu yoponyera, ndipo mphamvu yowonjezera mphamvu ya ceramic target ndi 1.5WH / cm2. Liwiro la chitsulo chowombera chisanachitike chikhoza kukhala chokwera kuposa cha block chandamale cha ceramic, ndipo mphamvu yowonjezera mphamvu ndi 1.5WH / cm2.
M'kati mwa pre sputtering, tiyenera kuyang'ana arcing chandamale. Nthawi ya presputtering nthawi zambiri imakhala pafupifupi mphindi 10. Ngati palibe arcing chodabwitsa, mosalekeza kuwonjezera sputtering mphamvu
Ku mphamvu yokhazikika. Malinga ndi zomwe zinachitikira, zovomerezeka Z mkulu sputtering mphamvu ya chandamale zitsulo ndi
25watts / cm2, 10watts / cm2 pa chandamale ceramic. Chonde yang'anani pazikhazikiko ndi chidziwitso cha kupanikizika kwa chipinda cha vacuum panthawi ya sputtering mu bukhu la ogwiritsira ntchito dongosolo. Nthawi zambiri, ziyenera kuwonetseredwa kuti kutentha kwa madzi potuluka madzi ozizira kuyenera kukhala kotsika kuposa 35 ℃, koma Z ndikofunikira kuwonetsetsa kuti njira yozungulira madzi ozizira imatha kugwira ntchito bwino.
Kuthamanga kofulumira kwa madzi otentha kwambiri kumachotsa kutentha, chomwe ndi chitsimikizo chofunikira kuonetsetsa kuti sputtering mosalekeza ndi mphamvu yaikulu. Kwa zolinga zachitsulo, nthawi zambiri zimalimbikitsidwa kuti madzi ozizira akuyenda
Kuthamanga kwa madzi kwa 20lpm ndi pafupifupi 5gmp; Pazolinga za ceramic, nthawi zambiri zimalimbikitsidwa kuti madzi akuyenda ndi 30lpm ndipo kuthamanga kwamadzi kumakhala pafupifupi 9gmp.
6, Kukonza chandamale
Kuti mupewe kufalikira kwafupipafupi komanso kutsekeka komwe kumachitika chifukwa cha zonyansa pakupopera, ndikofunikira kuchotsa sputter yomwe idasonkhanitsidwa pakati ndi mbali zonse ziwiri za njanji yotulutsa,
Izi zimathandizanso ogwiritsa ntchito kuti azingokhalira sputter pa z high power density
7, Kusungirako chandamale
Zolinga zoperekedwa ndi zitsulo za Gaozhan zimayikidwa m'matumba apulasitiki osanjikiza awiri. Timalimbikitsa kuti ogwiritsa ntchito azisunga mipherezero, kaya chitsulo kapena ceramic, mu vacuum phukusi. Makamaka, zolinga zomangira zimayenera kusungidwa pansi pavuyu kuti makutidwe ndi okosijeni a chigawo chomangirira asakhudze mtundu womangirira. Pankhani yoyika zida zachitsulo, timalimbikitsa kuti Z iyenera kupakidwa m'matumba apulasitiki oyera.
Nthawi yotumiza: May-13-2022