Mfundo za Magnetron Sputtering for Sputtering Target

Ogwiritsa ntchito ambiri ayenera kuti adamvapo za chinthu chomwe amalankhulira, koma mfundo yoti sputtering chandamale iyenera kukhala yachilendo. Tsopano, mkonzi waRich Special Material(RSM) amagawana mfundo za magnetron sputtering za chandamale cha sputtering.

Mphamvu yamagetsi ya orthogonal ndi gawo lamagetsi limawonjezeredwa pakati pa chandamale cha electrode (cathode) ndi anode, mpweya wofunikira wa inert (nthawi zambiri Ar gasi) umadzazidwa m'chipinda chapamwamba cha vacuum, maginito okhazikika amapanga 250 ~ 350 Gauss maginito. pamwamba pa deta chandamale, ndi orthogonal electromagnetic munda amapangidwa ndi mkulu-voltage magetsi magetsi.

Pansi pa mphamvu ya magetsi, Ar gasi imayikidwa mu ma ion ndi ma electron. Mpweya wina woipa kwambiri umawonjezeredwa ku chandamale. Mphamvu ya maginito pa ma elekitironi opangidwa kuchokera pamtengo womwe wawunikira komanso mwayi wa ionization wa kuwonjezeka kwa gasi, kupanga plasma yochuluka kwambiri pafupi ndi cathode. Pansi pa mphamvu ya Lorentz, ma Ar ions amathamangira kumalo omwe chandamale ndikuphulitsa chandamale pa liwiro lalikulu kwambiri, ma atomu otayika pa chandamale amatsata mfundo yosinthira mwachangu ndikuwulukira kutali ndi komwe chandamale kupita ku gawo lapansi ndi mphamvu yayikulu ya kinetic. kupanga mafilimu.

Magnetron sputtering nthawi zambiri amagawidwa m'mitundu iwiri: Tributary sputtering ndi RF sputtering. Mfundo ya zida za tributary sputtering ndi yosavuta, ndipo mlingo wake umakhalanso wachangu pamene sputtering zitsulo. RF sputtering imagwiritsidwa ntchito kwambiri. Kuphatikiza pa sputtering conductive materials, imathanso sputter non-conductive zipangizo. Panthawi imodzimodziyo, imapanganso sputtering yowonongeka kukonzekera zipangizo za oxides, nitrides, carbides ndi mankhwala ena. Ngati ma frequency a RF achulukitsidwa, amakhala microwave plasma sputtering. Tsopano, electron cyclotron resonance (ECR) microwave plasma sputtering amagwiritsidwa ntchito kwambiri.