Zofunikira pakugwiritsa ntchito zinthu zomwe zikufunika sputtering

Sputtered chandamale zipangizo ndi zofunika kwambiri pa ntchito, osati chiyero ndi tinthu kukula, komanso yunifolomu tinthu kukula. Zofunikira zazikuluzi zimatipangitsa kukhala osamala kwambiri tikamagwiritsa ntchito zida za sputtering.

1. Kukonzekera kubwebweta

Ndikofunikira kwambiri kusunga ukhondo wa chipinda cha vacuum, makamaka sputtering system. Mafuta, fumbi, ndi zotsalira zilizonse kuchokera ku zokutira zam'mbuyo zimatha kudziunjikira zowononga monga madzi, zomwe zimakhudza mwachindunji vacuum ndikuwonjezera mwayi wolephera kupanga filimu. Mabwalo afupikitsa, kutchingira chandamale, malo opangira mafilimu, ndi zonyansa zochulukirapo za mankhwala nthawi zambiri zimayamba chifukwa cha zipinda zopopera, mfuti, ndi chandamale.

Pofuna kusunga mawonekedwe a zokutira, mpweya wothira (argon kapena mpweya) uyenera kukhala woyera ndi wouma. Mukayika gawo lapansi m'chipinda chopopera, mpweya umayenera kuchotsedwa kuti ukwaniritse mulingo woyenera wa vacuum panjirayo.

2. Kuyeretsa chandamale

Cholinga cha kuyeretsa chandamale ndikuchotsa fumbi kapena dothi lililonse lomwe lingakhale pamwamba pa chandamalecho.

3. Kuyika chandamale

Chofunikira kwambiri chomwe muyenera kulabadira pakuyika zinthu zomwe mukufuna ndikuwonetsetsa kuti pali kulumikizana kwabwino kwamafuta pakati pa zomwe mukufuna ndi khoma loziziritsa lamfuti ya sputtering. Ngati khoma lozizirira kapena mbale yakumbuyo yapindika kwambiri, imatha kusweka kapena kupindika pakuyika chinthu chomwe mukufuna. Kutentha kwa kutentha kuchokera ku chandamale chakumbuyo kupita kuzinthu zomwe zikugwiritsidwa ntchito kudzakhudzidwa kwambiri, zomwe zimapangitsa kuti pakhale kulephera kutaya kutentha panthawi ya sputtering, potsirizira pake kumayambitsa kusweka kapena kusokonezeka kwa zinthu zomwe zikugwiritsidwa ntchito.

4. Kuyendera kwafupipafupi ndi kusindikiza kusindikiza

Pambuyo pa kukhazikitsidwa kwa zinthu zomwe mukufuna, ndikofunikira kuyang'ana dera lalifupi ndi kusindikiza cathode yonse. Ndibwino kugwiritsa ntchito ohmmeter ndi megohmmeter kuti mudziwe ngati cathode ndi yochepa. Pambuyo potsimikizira kuti cathode sifupikitsa, kutulukira kwamadzi kungathe kuchitidwa mwa kubaya madzi mu cathode kuti mudziwe ngati pali kutuluka.

5. Chandamale zinthu chisanadze sputtering

Ndibwino kuti mugwiritse ntchito mpweya wa argon kuti muyambe kutaya zinthu zomwe mukufuna, zomwe zingathe kuyeretsa pamwamba pa zomwe mukufuna. Ndibwino kuti pang'onopang'ono kuwonjezera mphamvu sputtering pa chisanadze sputtering ndondomeko chandamale. Mphamvu ya zinthu za ceramic chandamale