Main katundu wa sputtering chandamale chandamale

Tiyenera kukhala odziwa bwino chandamale tsopano, tsopano msika womwe tikufuna nawo ukuwonjezeka, zotsatirazi ndizomwe zimagwira ntchito kwambiri popanga chandamale chogawana ndi mkonzi wochokera ku RSM.

　　Ungwiro

Kuyera kwa zinthu zomwe mukufuna ndi chimodzi mwazinthu zazikulu zogwirira ntchito, chifukwa chiyero cha zinthu zomwe mukufuna chimakhudza kwambiri filimu yopyapyala. Komabe, pogwiritsira ntchito, zofunikira za chiyero cha zipangizo zowunikira sizili zofanana. Mwachitsanzo, ndi chitukuko chofulumira cha makampani a microelectronics, kukula kwa silicon chip kwapangidwa kuchokera ku 6 ", 8" mpaka 12 ", ndipo m'lifupi mwake mawaya amachepetsedwa kuchokera ku 0.5um mpaka 0.25um, 0.18um kapena 0.13um. M'mbuyomu, chiyero cha 99.995% chandamale chimatha kukwaniritsa zofunikira za 0.35umIC. Kuyera kwa zinthu zomwe mukufuna ndi 99.999% kapena 99.9999% pokonzekera mizere ya 0.18um.

　　Zonyansa

Zonyansa zomwe zili mu chandamalezo zimakhala zolimba komanso mpweya wa okosijeni ndi madzi m'mabowo ndizomwe zimawononga kwambiri pakuyika filimu. Zida zomwe zimapangidwira pazifukwa zosiyanasiyana zimakhala ndi zofunikira zosiyanasiyana pazoyipa zosiyanasiyana. Mwachitsanzo, mipherezero yoyera ya aluminiyamu ndi zitsulo zotayidwa zomwe zimagwiritsidwa ntchito m'mafakitale a semiconductor zimakhala ndi zofunikira zapadera pazomwe zili ndi zitsulo zamchere ndi zinthu zotulutsa ma radio.

　　Kuchulukana

Kuti muchepetse porosity mu chandamale cholimba ndikuwongolera magwiridwe antchito a filimu ya sputtering, kachulukidwe kakang'ono ka chandamale kaŵirikaŵiri kumafunika. Kuchuluka kwa chandamale kumakhudza osati kuchuluka kwa sputtering komanso mphamvu zamagetsi ndi kuwala kwa filimuyo. Kuchulukitsitsa kwazomwe mukufuna, kumapangitsa kuti filimuyo ikhale yabwino. Kuonjezera apo, kuchulukitsa kachulukidwe ndi mphamvu ya chandamale kumapangitsa kuti cholingacho chikhale bwino kupirira kupsinjika kwa kutentha mu ndondomeko ya sputtering. Kachulukidwe ndi chimodzi mwazofunikira kwambiri pazolinga.

　　Kukula kwa mbewu ndi kagawidwe kake

Cholinga chake nthawi zambiri chimakhala polycrystalline ndi kukula kwa tirigu kuyambira micrometer mpaka millimeter. Kwa cholinga chomwecho, sputtering mlingo wa chandamale ndi mbewu zazing'ono ndi mofulumira kuposa chandamale ndi mbewu zazikulu. Kugawa kwa makulidwe a makanema osungidwa ndi chandamale cha sputtering ndi kusiyana kochepa kwa kukula kwambewu (kugawa kofanana) ndikofanana kwambiri.