Zotsatira za sputtering chandamale ndi chandamale cha aluminiyamu

Cholinga cha sputtering ndi chinthu chamagetsi chomwe chimapanga filimu yopyapyala pomangirira chinthu monga alloy kapena metal oxide ku gawo lamagetsi pamlingo wa atomiki. Pakati pawo, sputtering chandamale cha filimu yakuda imagwiritsidwa ntchito kupanga filimu pa organic EL kapena liquid crystal panel kuti idetse mawaya ndi kuchepetsa kuwala kowoneka bwino (kutsika kochepa) kwa waya wa TFT. Cholinga cha sputter chili ndi ubwino ndi zotsatira zotsatirazi. Poyerekeza ndi zinthu zam'mbuyomu, zimathandizira kuwongolera kuchuluka kwa fineness ndi ufulu wopanga mawonekedwe osiyanasiyana, ndikuchepetsa phokoso lomwe limayambitsidwa ndi mawaya owoneka bwino azinthu zokhudzana ndi semiconductor.

　　Ubwino ndi zotsatira za aluminium chandamale:

(1) Pambuyo popanga chandamale cha aluminiyamu pa waya, kuwala kowoneka kumatha kuchepetsedwa

Poyerekeza ndi zinthu zam'mbuyomu, zimatha kuwunikira pang'ono.

(2) DC sputtering ikhoza kuchitidwa popanda mpweya wokhazikika

poyerekeza ndi zinthu zam'mbuyomu, ndizothandiza kuzindikira filimuyo homogeneity ya magawo akulu.

(3) filimuyo ikapangidwa, njira yolumikizira imatha kuchitidwa limodzi ndi waya

sinthani zinthuzo molingana ndi njira yomwe ilipo yolumikizira kasitomala, ndipo mutha kulumikiza pamodzi ndi waya popanda kusintha njira yomwe ilipo. Kuphatikiza apo, kampaniyo iperekanso chithandizo malinga ndi momwe makasitomala amakhudzidwira.

(4) Kukana kutentha kwabwino, madzi ndi alkali kukana

kuwonjezera pa kukana madzi ndi kukana kwa alkali, imakhalanso ndi kutentha kwakukulu, kotero makhalidwe a filimuyo sangasinthe mu ndondomeko ya TFT wiring processing process.