Tonse tikudziwa kuti sputtering ndi imodzi mwamakina akuluakulu opangira mafilimu. Amagwiritsa ntchito ma ion opangidwa ndi gwero la ion kuti apititse patsogolo kuphatikizika mu vacuum kuti apange mtengo wothamanga kwambiri wa ion, kuphulitsa malo olimba, ndi ma ion kusinthanitsa mphamvu ya kinetic ndi ma atomu pamtunda wolimba, kuti maatomu olimba. pamwamba kusiya cholimba ndi kuika pa gawo lapansi. Zolimba zomwe zimaphulitsidwa ndizomwe zimayikidwa poyikira filimu ndi sputtering, zomwe zimatchedwa sputtering target.
Mitundu yosiyanasiyana yazinthu zamakanema zotayidwa zakhala zikugwiritsidwa ntchito kwambiri mumayendedwe ophatikizika a semiconductor, zojambulira zojambulira, mawonedwe a planar, zida ndi zokutira pamwamba ndi zina zotero.
Zolinga za sputtering zimagwiritsidwa ntchito makamaka m'mafakitale amagetsi ndi zidziwitso, monga mabwalo ophatikizika, kusungirako zidziwitso, zowonetsera zamadzimadzi, kukumbukira kwa laser, zida zowongolera zamagetsi, ndi zina zambiri; Itha kugwiritsidwanso ntchito m'munda wa zokutira magalasi; Itha kugwiritsidwanso ntchito pazinthu zosavala, kukana kutentha kwambiri kwa dzimbiri, zinthu zokongoletsera zapamwamba ndi mafakitale ena.
Pali mitundu yambiri ya zolinga za sputtering, ndipo pali njira zosiyanasiyana zogawira zolinga:
Malinga ndi kapangidwe kake, itha kugawidwa mu chandamale chachitsulo, chandamale cha aloyi ndi chandamale cha ceramic.
Malinga ndi mawonekedwe ake, amatha kugawidwa kukhala chandamale chachitali, chandamale chamzere ndi chandamale chozungulira.
Itha kugawidwa mu chandamale cha microelectronic, chandamale chojambulira maginito, chandamale cha disk optical, chandamale chachitsulo chamtengo wapatali, chandamale cha kukana mafilimu, chandamale cha filimu yoyendetsa, chandamale chosinthira pamwamba, chandamale cha chigoba, chandamale chokongoletsera, chandamale cha electrode ndi zolinga zina malinga ndi gawo la ntchito.
Malinga ndi ntchito zosiyanasiyana, itha kugawidwa m'magulu a ceramic okhudzana ndi semiconductor, kujambula zolinga za ceramic zapakati, zowonetsera za ceramic, superconducting ceramic targets ndi giant magnetoresistance ceramic targets.
Nthawi yotumiza: Jul-29-2022