Chiyembekezo cha chitukuko cha chandamale chamkuwa choyera kwambiri

Pakalipano, pafupifupi zolinga zonse zazitsulo zamkuwa zotsika kwambiri zomwe zimafunidwa ndi makampani a IC zimayendetsedwa ndi makampani akuluakulu angapo akunja. Zolinga zonse zamkuwa zomwe zimafunikira makampani apakhomo a IC ziyenera kutumizidwa kunja, zomwe sizokwera mtengo zokha, komanso zovuta kwambiri pakulowetsamo. . Tiyeni tiwone mfundo zazikulu ndi zovuta pakukula kwa ultra-high pure purity (6N) copper sputtering targets.

1,Kukula kopitilira muyeso mkulu chiyero zipangizo

Ukadaulo woyeretsa wazitsulo za Cu, Al ndi Ta ku China ndizotalikirana ndi zomwe zili m'maiko otukuka. Pakalipano, zitsulo zambiri zoyera kwambiri zomwe zingaperekedwe sizingakwaniritse zofunikira zamagulu ophatikizika kuti aziwombera molingana ndi njira zonse zowunikira zinthu zomwe zimagwiritsidwa ntchito pamakampani. Chiwerengero cha zophatikizidwa mu chandamale ndichokwera kwambiri kapena chogawidwa mosagwirizana. Tinthu tating'onoting'ono nthawi zambiri timapanga pa chophwanyika panthawi ya sputtering, zomwe zimapangitsa kuti pakhale dera lalifupi kapena lotseguka la interconnect, zomwe zimakhudza kwambiri filimuyo.

2,Kupititsa patsogolo luso laukadaulo la copper sputtering

Kukula kwaukadaulo wokonzekera chandamale cha copper sputtering makamaka kumayang'ana mbali zitatu: kukula kwa tirigu, kuwongolera koyang'anira ndi kufanana. Makampani opanga ma semiconductor ali ndi zofunika kwambiri pazolinga za sputtering komanso kutulutsa zinthu zopangira nthunzi. Ili ndi zofunikira zokhwima kwambiri pakuwongolera kukula kwambewu yambewu ndi mawonekedwe a kristalo a chandamale. Kukula kwambewu kwa chandamale kuyenera kuyendetsedwa pa 100μ M pansipa, motero, kuyang'anira kukula kwa tirigu ndi njira zowunikira ndikuwunikira ndikofunika kwambiri kuti pakhale zolinga zachitsulo.

3,Kupititsa patsogolo kusanthula ndikuyesa luso

Kuyeretsedwa kwakukulu kwa cholingacho kumatanthauza kuchepetsa zonyansa. M'mbuyomu, plasma (ICP) ndi ma atomic mayamwidwe spectrometry ankagwiritsidwa ntchito kudziwa zonyansa, koma m'zaka zaposachedwa, glow discharge quality analysis (GDMS) yokhala ndi mphamvu zambiri yakhala ikugwiritsidwa ntchito pang'onopang'ono ngati muyezo. njira. Njira yotsalira yokana RRR imagwiritsidwa ntchito makamaka pozindikira kuyera kwamagetsi. Mfundo yake yotsimikiza ndikuyesa kuyera kwazitsulo zoyambira poyesa kuchuluka kwa kufalikira kwa zonyansa pakompyuta. Chifukwa ndi kuyeza kukana kutentha kwa chipinda ndi kutentha kochepa kwambiri, n'zosavuta kutenga chiwerengerocho. M'zaka zaposachedwa, kuti mufufuze tanthauzo la zitsulo, kafukufuku wokhudzana ndi chiyero chapamwamba kwambiri akugwira ntchito kwambiri. Pankhaniyi, mtengo wa RRR ndiyo njira yabwino yowunikira chiyero.