Zofunikira zamakhalidwe a chandamale cha molybdenum sputtering

Posachedwapa, abwenzi ambiri anafunsa za makhalidwe a molybdenum sputtering chandamale. M'makampani amagetsi, kuti mupititse patsogolo kutulutsa bwino komanso kuwonetsetsa kuti mafilimu osungidwa bwino, ndi zotani zomwe zimafunikira kuti mukhale ndi zolinga za molybdenum sputtering? Tsopano akatswiri aukadaulo ochokera ku RSM atifotokozera.

　　1. Chiyero

Kuyeretsedwa kwakukulu ndi chinthu chofunikira kwambiri pa chandamale cha molybdenum sputtering. Kukwezera chiyero cha chandamale cha molybdenum, kumapangitsa kuti filimu yotayidwa ikhale yabwino. Nthawi zambiri, chiyero cha chandamale cha molybdenum sputtering chiyenera kukhala osachepera 99.95% (kachigawo kakang'ono, chimodzimodzi pansipa). Komabe, ndikusintha kosalekeza kwa kukula kwa gawo lapansi lagalasi mumsika wa LCD, kutalika kwa waya kumafunika kukulitsidwa ndipo kutalika kwa mzere kumafunika kukhala kocheperako. Pofuna kuwonetsetsa kuti filimuyo ndi yofanana komanso mtundu wa waya, chiyero cha cholinga cha sputtering cha molybdenum chiyenera kuwonjezereka moyenerera. Choncho, malinga ndi kukula kwa gawo lapansi la galasi lotayidwa ndi malo ogwiritsira ntchito, chiyero cha sputtering cha molybdenum chiyenera kukhala 99.99% - 99.999% kapena kuposa.

Molybdenum sputtering target imagwiritsidwa ntchito ngati gwero la cathode pakulaza. Zonyansa zolimba komanso mpweya ndi mpweya wamadzi m'mabowo ndizomwe zimawononga kwambiri mafilimu osungidwa. Kuonjezera apo, m'makampani amagetsi, chifukwa ma ion zitsulo za alkali (Na, K) ndi osavuta kukhala ma ion a mafoni muzitsulo zotsekemera, ntchito ya chipangizo choyambirira imachepetsedwa; Zinthu monga uranium (U) ndi titaniyamu (TI) zidzatulutsidwa α X-ray, zomwe zimabweretsa kuwonongeka kofewa kwa zipangizo; Iron ndi nickel ions zipangitsa kutayikira kwa mawonekedwe ndikuwonjezera kwa oxygen. Choncho, pokonzekera chandamale cha sputtering molybdenum, zinthu zonyansazi ziyenera kuyendetsedwa mosamalitsa kuti zichepetse zomwe zili mu chandamale.

　　2. Kukula kwambewu ndi kagawidwe kake

Nthawi zambiri, chandamale cha sputtering ya molybdenum ndi mawonekedwe a polycrystalline, ndipo kukula kwambewu kumatha kuchoka ku micron mpaka millimeter. Zotsatira zoyesera zikuwonetsa kuti kuchuluka kwa sputtering kwa chandamale cha tirigu wabwino kumathamanga kwambiri kuposa chandamale yambewu yolimba; Kwa chandamale chokhala ndi kusiyana pang'ono kwa kukula kwambewu, kugawa makulidwe a filimu yoyikidwako kumakhalanso kofanana.

　　3. Kuwongolera kwa kristalo

Chifukwa maatomu omwe amawunikirawo ndi osavuta kuthamangitsidwa motsatira njira yapafupi kwambiri ya ma atomu munjira ya hexagonal panthawi ya sputtering, kuti akwaniritse kutulutsa kwapamwamba kwambiri, kuchuluka kwa sputtering nthawi zambiri kumawonjezeka posintha mawonekedwe a kristalo a chandamale. Mayendedwe a kristalo a chandamale alinso ndi chikoka chachikulu pa makulidwe ofanana a filimu yotayidwa. Choncho, n'kofunika kwambiri kupeza kristalo oriented chandamale dongosolo sputtering ndondomeko filimu.

　　4. Kuchulukana

Mukati mwakuthira, pamene chandamale cha sputtering ndi kachulukidwe kakang'ono kawomberedwa, mpweya womwe umapezeka m'miyendo yamkati mwa chandamale umatulutsidwa mwadzidzidzi, zomwe zimapangitsa kuti tinthu tating'onoting'ono tating'onoting'ono kapena tinthu tating'onoting'ono, kapena filimuyo iphulitsidwe. ndi ma elekitironi achiwiri pambuyo pa kupanga filimu, zomwe zimapangitsa kuti tinthu tating'ono ting'onoting'ono ting'onoting'ono. Maonekedwe a tinthu tating'onoting'ono timachepetsa ubwino wa filimuyi. Pofuna kuchepetsa ma pores mu chandamale cholimba ndikuwongolera filimuyo, cholinga cha sputtering nthawi zambiri chimayenera kukhala ndi kachulukidwe kwambiri. Kwa chandamale cha sputtering molybdenum, kachulukidwe kake kuyenera kukhala kopitilira 98%.

　　5. Kumanga chandamale ndi chassis

Nthawi zambiri, chassis ya molybdenum sputtering iyenera kulumikizidwa ndi chassis yopanda okosijeni (kapena aluminiyamu ndi zinthu zina) isanaponyedwe, kuti matenthedwe a chandamale ndi chassis akhale abwino panthawi ya sputtering. Pambuyo kumanga, akupanga anayendera ayenera kuchitidwa kuonetsetsa kuti sanali kugwirizana dera awiri ndi zosakwana 2%, kuti akwaniritse zofunika mkulu-mphamvu sputtering popanda kugwa.