Monga tonse tikudziwira, chitukuko chaukadaulo wazinthu zomwe chandamale chikugwirizana kwambiri ndi chitukuko chaukadaulo wamakanema pamakina ogwiritsira ntchito otsika. Ndi kusintha kwaukadaulo kwazinthu zamakanema kapena zida zomwe zimagwiritsidwa ntchito pamakampani ogwiritsira ntchito, ukadaulo womwe ukufunidwa uyeneranso kusintha. Mwachitsanzo, opanga Ic posachedwapa ayang'ana pa chitukuko cha low resistivity copper wiring, chomwe chikuyembekezeka kusintha kwambiri filimu yoyambirira ya aluminiyamu m'zaka zingapo zikubwerazi, kotero kuti chitukuko cha zolinga zamkuwa ndi zolinga zawo zolepheretsa zidzafunika mwamsanga.
Kuphatikiza apo, m'zaka zaposachedwa, mawonekedwe a flat panel (FPD) alowa m'malo mwa makina a cathode-ray chubu (CRT) -mawonekedwe apakompyuta ndi msika wa kanema wawayilesi. Ziwonjezeranso kwambiri kufunikira kwaukadaulo ndi msika wazolinga za ITO. Ndiyeno pali luso yosungirako. Kufunika kwa ma hard-kachulukidwe apamwamba, ma hard drive amphamvu zazikulu komanso ma disks ochulukira kwambiri ofufutika akupitilira kukula. Zonsezi zapangitsa kuti pakhale kusintha kwa kufunikira kwa zinthu zomwe zikufunika pamakampani ogwiritsira ntchito. M'munsimu, tikuwonetsani magawo akuluakulu azomwe mukufuna komanso momwe mukufunira m'magawo awa.
1. Microelectronics
M'mafakitale onse ogwiritsira ntchito, makampani opanga ma semiconductor ali ndi zofunikira zolimba kwambiri zamakanema omwe amawombera. Zophika za silicon za mainchesi 12 (300 epistaxis) tsopano zapangidwa. Kukula kwa cholumikizira kukucheperachepera. Zofunikira za opanga ma silicon ophatikizika pazinthu zomwe akutsata ndi zazikulu, zoyera kwambiri, tsankho lochepa komanso tirigu wabwino, zomwe zimafunikira kuti zida zomwe mukufuna kuti zikhale ndi microstructure yabwino. Kukula kwa tinthu tating'ono ta crystalline ndi kufanana kwa zinthu zomwe mukufuna kutsata zawonedwa ngati zinthu zazikulu zomwe zimakhudza kuchuluka kwa filimuyi.
Poyerekeza ndi zotayidwa, mkuwa ali apamwamba electromobility kukana ndi m'munsi resistivity, amene angathe kukwaniritsa zofunika kondakitala luso mu submicron mawaya pansipa 0,25um, koma kumabweretsa mavuto ena: otsika adhesion mphamvu pakati mkuwa ndi organic sing'anga zipangizo. Komanso, ndizosavuta kuchitapo kanthu, zomwe zimatsogolera ku dzimbiri za kulumikizana kwa mkuwa komanso kusweka kwa dera pakugwiritsa ntchito chip. Kuti athetse vutoli, chotchinga chotchinga chiyenera kukhazikitsidwa pakati pa mkuwa ndi dielectric layer.
Zida zomwe zimagwiritsidwa ntchito pazitsulo zotchinga zamkuwa zikuphatikizapo Ta, W, TaSi, WSi, ndi zina zotero. Koma Ta ndi W ndi zitsulo zokana. Ndizovuta kupanga, ndipo ma aloyi monga molybdenum ndi chromium akuphunziridwa ngati zida zina.
2. Kwa chiwonetsero
Flat panel display (FPD) yakhudza kwambiri makina a cathode-ray chubu (CRT) -based computer monitor and the television market pazaka zambiri, ndipo idzayendetsanso ukadaulo ndi kufunikira kwa msika kwa zida zomwe ITO ikufuna. Pali mitundu iwiri ya zolinga za ITO lero. Imodzi ndiyo kugwiritsa ntchito nanometer state of indium oxide ndi tin oxide powder pambuyo pa sintering, ina ndikugwiritsa ntchito chandamale cha indium tin alloy. Kanema wa ITO atha kupangidwa ndi DC reactive sputtering pa chandamale cha indium-tin alloy, koma chandamalecho chimadzaza ndi oxidize komanso kukhudza kuchuluka kwa sputtering, ndipo ndizovuta kupeza chandamale chachikulu cha alloy.
Masiku ano, njira yoyamba imatengedwa kuti ipange zinthu za ITO, zomwe zimakutira ndi magnetron sputtering reaction. Ili ndi liwiro loyika mwachangu. Makulidwe a filimu amatha kuyendetsedwa bwino, ma conductivity ndi apamwamba, kusasinthika kwa filimuyo ndikwabwino, ndipo kumamatira kwa gawo lapansi kumakhala kolimba. Koma chinthu chomwe mukufuna kupanga chimakhala chovuta, chifukwa indium oxide ndi tin oxide sizilumikizana mosavuta. Nthawi zambiri, ZrO2, Bi2O3 ndi CeO amasankhidwa ngati zowonjezera zowonjezera, ndipo zinthu zomwe mukufunazo zokhala ndi kachulukidwe ka 93% ~ 98% ya mtengo wazongopeka zitha kupezeka. Kuchita kwa filimu ya ITO yopangidwa motere kuli ndi ubale wabwino ndi zowonjezera.
Kutsekereza kutsekeka kwa filimu ya ITO yopezedwa pogwiritsa ntchito chandamale chotere kumafika pa 8.1 × 10n-cm, yomwe ili pafupi ndi filimu yoyera ya ITO. Kukula kwa FPD ndi galasi conductive ndi lalikulu ndithu, ndipo m'lifupi galasi conductive akhoza ngakhale kufika 3133mm. Kuti apititse patsogolo kagwiritsidwe ntchito ka zinthu zomwe akufuna, zida za ITO zokhala ndi mawonekedwe osiyanasiyana, monga mawonekedwe a cylindrical, zimapangidwa. Mu 2000, National Development Planning Commission ndi Unduna wa Sayansi ndi Ukadaulo adaphatikiza zolinga zazikulu za ITO mu Upangiri wa Magawo Ofunika Kwambiri Pamakampani Odziwa Zambiri Panopa Amene Ali Patsogolo Pachitukuko.
3. Kugwiritsa ntchito yosungirako
Pankhani ya teknoloji yosungiramo zinthu, kupititsa patsogolo ma disks olimba kwambiri komanso akuluakulu amafunikira zipangizo zambiri za filimu zokanira. Kanema wa CoF~Cu multilayer composite ndi mawonekedwe omwe amagwiritsidwa ntchito kwambiri pafilimu yayikulu yokana. The TbFeCo alloy chandamale chandamale zofunika maginito chimbale akadali patsogolo. The maginito chimbale chopangidwa ndi TbFeCo ali makhalidwe lalikulu yosungirako mphamvu, moyo wautali utumiki ndi mobwerezabwereza sanali kukhudzana erasability.
Antimony germanium telluride based phase change memory (PCM) idawonetsa kuthekera kwakukulu pazamalonda, imakhala gawo la NOR flash memory ndi msika wa DRAM ukadaulo wina wosungirako, komabe, pakukhazikitsa kutsika mwachangu kwambiri chimodzi mwamavuto omwe akukumana nawo ndikusowa kukonzanso. kupanga panopa akhoza adatchithisira zina kwathunthu losindikizidwa unit. Kuchepetsa kukonzanso kwapano kumachepetsa kugwiritsa ntchito kukumbukira mphamvu, kumawonjezera moyo wa batri, ndikuwongolera bandwidth ya data, zinthu zonse zofunika pazida zamakono zomwe zimagwiritsidwa ntchito ndi ogula.
Nthawi yotumiza: Aug-09-2022