Metal target refers to the intended material of high-speed energy-carrying particles that are impacted. In addition, by replacing different target materials (eg, aluminum, copper, stainless steel, titanium, nickel targets, etc.), different film systems (eg, superhard, wear-resistant, anti-corrosion alloy films, etc.) can be obtained. With the development of the times, a lot of new material targets have appeared in the big family as new members to welcome titanium-aluminum alloy targets.
The titanium-aluminum alloy target is a target made of titanium-aluminum alloy as the raw material. Generally silver-white, it has the advantages of high strength and high melting point. So what is the practice of titanium aluminum alloy target?
So far, large international manufacturers have adopted these two methods for the manufacture of titanium-aluminum alloy targets. One is to use the casting method to manufacture the ingot, and then to manufacture the target during the casting process. The other is made with spray-formed titanium-aluminum alloy targets.
The casting and casting method that is famous for this method is that in the process of manufacturing aluminum alloy sputtering targets, due to the important process of often adding alloys, segregation occurs in the aluminum alloy target material, and the quality of the film obtained by sputtering is not high. , the surface of the sputtering target is prone to tiny particles, which affect the uniformity of the film properties. The titanium-aluminum alloy target manufactured by the second spray forming method can prevent the above situation, but the manufacturing cost of the target will be greatly increased.
In particular, when making objects that are difficult to cast, it is necessary to use a hot equalizing pressure target, and the cost is increased due to the use of the hot equalizing pressure.
In addition to the above two traditional methods of titanium-aluminum alloy targets, a simple and inexpensive method is introduced today. Manufacture of titanium-aluminum alloy targets with spray powder.
Below, the editor of Beijing Ruichi will share with you the manufacturing method of titanium aluminum alloy target.
1. The first principle
The main principle of this method is to use the aerosol method to manufacture the raw material powder of the target with the alloy composition ratio. The alloy powder is then sieved to obtain the proper powder particle size. The obtained powder is then used for vacuum hot pressing to form a target.
2. Primary advantage
The advantage of this manufacturing method is that it can manufacture various aluminum alloy targets such as aluminum and chromium. Aluminum, silicon, copper aluminum, titanium, etc. Second, this approach can prevent material segregation and microparticle defects, resulting in faster and more economical fabrication of quality titanium-aluminum alloy targets.
3. Implementation process
The correct implementation process of this method is to first provide metal raw materials for making aluminum alloy targets. These metal feedstocks are then melted in a metal solution. Then, the metal solution is made into metal powder by aerosol. Then, the metal powder target is formed by vacuum hot pressing, and an inert gas is used as a protective gas.
Post time: Apr-27-2022