Many users do not consider the purchase of targets from a professional point of view, so what should be paid attention to when purchasing targets? Let’s ask the Xiaobian of Beijing Ruichi to point out the matters needing attention when purchasing targets.
Firstly, for the target, the purity is one of its main functional indicators, and the purity of the target has a great impact on the function of the later product film. Each product also has different requirements for the purity of the target.
Secondly, the impurity content of individual elements in the target. After a series of target processing, the impurities in the target solid and the oxygen and water vapor in the pores are the main pollution sources of the deposited films. Due to the different uses of targets, the requirements for different impurity contents of targets with different uses are also different. For example, pure aluminum and aluminum alloy targets used in the semiconductor industry now have special requirements for the content of alkali metals and radioactive elements.
Density is also one of the important performance indexes of the target In the technical process of the target, in order to reduce the pores in the target solid and improve the function of the sputtered film, the target is generally required to have a high density. The main characteristic density of the target has a great influence on the sputtering rate, and affects the electrical and optical functions of the film. The higher the target density, the better the function of the film.
Finally, the grain size and grain distribution. Usually, the target material is polycrystalline, and the grain size can range from micron to millimeter. For the same target, the sputtering rate of fine grain target is faster than that of coarse grain target; The thickness of the films deposited by target sputtering with small grain size difference (uniform dispersion) is more uniform.
Post time: Jun-10-2022