Titanium aluminum alloy is an alloy sputtering target for vacuum deposition. Titanium aluminum alloy targets with different characteristics can be obtained by adjusting the content of titanium and aluminum in this alloy. Titanium aluminum intermetallic compounds are hard and brittle materials with good wear resistance. They are coated with a layer of titanium aluminum intermetallic compounds on the surface of ordinary cutting tools, which can effectively extend the service life of the tools. If sputtering is carried out with nitrogen discharge arc starting, a high hardness and low friction coefficient surface facial mask can be obtained, which is especially suitable for the surface coating of various tools, molds and other vulnerable parts. Therefore, it has a good application prospect in the machining industry.
The preparation of titanium aluminum alloy targets is relatively difficult. According to the phase diagram of titanium aluminum alloy, various intermetallic compounds can be formed between titanium and aluminum, leading to processing brittleness in titanium aluminum alloy. Especially when the aluminum content in the alloy exceeds 50% (atomic ratio), the oxidation resistance of the alloy suddenly decreases and the oxidation is severe. At the same time, the exothermic expansion during the alloying process can easily generate bubbles, shrinkage pores, and porosity, resulting in high porosity of the alloy and inability to meet the density requirements of the target material. There are two main methods for preparing titanium aluminum alloys:
1、 Strong current heating method
This method uses a device that can obtain high current, which heats up titanium powder and aluminum powder, applies pressure, and causes aluminum and titanium to react to form titanium aluminum alloy targets. The density of the titanium aluminum alloy target product prepared by this method is>99%, and the grain size is ≤ 100 μ m. Purity>99%. The composition range of titanium aluminum alloy target material is: titanium content of 5% to 75% (atomic ratio), and the rest is aluminum content. This method has low cost and high product density, and can fully meet the requirements of large-scale industrial production.
2、 Hot isostatic pressing sintering method
This method mixes titanium powder and aluminum powder, then undergoes powder loading, cold isostatic pressing pre pressing, degassing process, and then hot isostatic pressing forming. Finally, sintering and processing are carried out to obtain titanium aluminum alloy targets. The titanium aluminum alloy target prepared by this method has the characteristics of high density, no pores, no porosity and segregation, uniform composition, and fine grains. The hot isostatic pressing method is currently the main method for preparing titanium aluminum alloy sputtering targets required by the coating industry.
Post time: May-10-2023