As we all know, purity is one of the main performance indicators of the target. In actual use, the purity requirements of the target are also different. Compared with the general industrial pure titanium, high-purity titanium is expensive and has a narrow range of applications. It is mainly used to meet the use of some special industries. So what are the main applications of high-purity titanium targets? Now let’s follow the specialist of RSM.
The use of high-purity titanium targets mainly includes the following points:
1. Biomaterials
Titanium is a non-magnetic metal, which will not be magnetized in a strong magnetic field, and has good compatibility with the human body, non-toxic side effects, and can be used to manufacture human implanted devices. Generally, medical titanium materials do not reach the level of high-purity titanium, but considering the dissolution of impurities in titanium, the purity of titanium for implants should be as high as possible. It is mentioned in the literature that high-purity titanium wire can be used as biological binding material. In addition, the titanium injection needle with embedded catheter has also reached the level of high-purity titanium.
2. Decorative materials
High purity titanium has excellent atmospheric corrosion resistance and will not change color after long-term use in the atmosphere, ensuring the original color of titanium. Therefore, high purity titanium can also be used as building decoration materials. In addition, in recent years, some high-end decorations and some wearables, such as bracelets, watches and spectacle frames, are made of titanium, which takes advantage of its corrosion resistance, non discoloration, long-term good gloss and non sensitization to human skin. The purity of titanium used in some decorations has reached 5N level.
3. Inspiratory material
Titanium, as a metal with very active chemical properties, can react with many elements and compounds at high temperatures. High purity titanium has strong adsorption for active gases (such as,，，CO，， water vapor above 650 ℃), and the Ti film evaporated on the pump wall can form a surface with high adsorption capacity. This property makes Ti widely used as a getter in ultra-high vacuum pumping systems. If used in sublimation pumps, sputtering ion pumps, etc., the ultimate working pressure of sputtering ion pumps can be as low as PA.
4. Electronic information materials
In recent years, with the rapid development of semiconductor technology, information technology and other high-tech fields, high-purity titanium is used more and more in sputtering targets, integrated circuits, DRAMs and flat panel displays, and the purity of titanium is required more and more. In the semiconductor VLSI industry, titanium silicon compound, titanium nitride compound, tungsten titanium compound, etc. are used as diffusion barrier and wiring materials for control electrodes. These materials are made by sputtering method, and the titanium target used by sputtering method requires high purity, especially the content of alkali metal elements and radioactive elements is very low.
In addition to the above-mentioned application fields, high-purity titanium is also used in special alloys and functional materials
Post time: Jul-11-2022