In order to support the film based piezoelectric MEMS (pMEMS) sensor and radio frequency (RF) filter components industry, the aluminum scandium alloy manufactured by Rich Special Material Co., Ltd. is specially used for the reactive deposition of scandium doped aluminum nitride films.
Thin film piezoelectric materials are increasingly used in automotive, industrial and personal electronic equipment. Applications include pmt based fingerprint sensors and gesture recognition devices, MEMS microphones, resonator based chemical sensors and medical sensors. In addition, scandium doped aluminum nitride films are increasingly needed to realize RF filters for 5G network applications. At the same time, the amount of aluminum scandium alloy is increasing.
Properties of Al Sc Alloy
Highly consistent chemical homogeneity throughout the alloy
Highly consistent film chemical homogeneity throughout the life of the chip and alloy
Purity>99.9%, low oxygen content, low critical pollutant content
Strictly control the microstructure to achieve the best sputtering performance
Vacuum cast, fully dense alloy with low adhesion, low variability and low granularity
Rich Special Material Co., Ltd. supports a variety of alloy smelting, target customization and R&D services.
Post time: Nov-11-2022