Tungsten Silicide Pieces
Tungsten Silicide Pieces
Tungsten silicide WSi2 Kei te whakamahia hei rauemi ru hiko i roto i te microelectronics, shunting i runga i waea polysilicon, paninga anti-hāoratanga me te paninga waea ātete. Ka whakamahia te tungsten silicide hei rauemi whakapā i roto i te microelectronics, me te parenga o te 60-80μΩcm. Ka hangaia i te 1000°C. I te nuinga o te waa ka whakamahia hei shunt mo nga raina polysilicon hei whakanui ake i te kawe me te whakanui i te tere tohu. Ka taea te whakarite i te paparanga tungsten Silicide e te waipara kohu matū, penei i te waipara kohu. Whakamahia te monosilane, te dichlorosilane me te tungsten hexafluoride hei hau rawa. Ko te kiriata kua whakatakotoria he kore-stoichiometric me te whakapouri kia huri ki te ahua stoichiometric kaha ake.
Ka taea e te tungsten silicide te whakakapi i te kiriata tungsten o mua. Ka whakamahia ano te tungsten silicide hei paparanga arai i waenga i te silicon me etahi atu konganuku.
He mea nui ano te Tungsten silicide i roto i nga punaha microelectromechanical, i roto i enei ko te tungsten silicide te nuinga ka whakamahia hei kiriata angiangi mo te hanga microcircuits. Mo tenei kaupapa, ko te kiriata tungsten silicide ka taea te plasma-etched ma te whakamahi, hei tauira, silicide.
| ITEM | Te hanganga matū | |||||
| Huānga | W | C | P | Fe | S | Si |
| Ihirangi(wt%) | 76.22 | 0.01 | 0.001 | 0.12 | 0.004 | Taurite |
Ko nga Taonga Taonga Taonga he tohungatanga ki te Hanganga o te Sputtering Target ka taea te whakaputa Tungsten Silicidemongamongakia rite ki nga korero a nga Kaihoko. Mo etahi atu korero, whakapaa mai ki a matou.
