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Leading Manufacturer for Copper Nickel Titanium Alloy Sputtering Target - Tungsten Silicide Pieces – Rich

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Leading Manufacturer for Copper Nickel Titanium Alloy Sputtering Target - Tungsten Silicide Pieces – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide pieces according to Customers’ specifications. For more information, please contact us.


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We believe that prolonged expression partnership is really a result of top of the range, value added support, rich encounter and personal contact for Leading Manufacturer for Copper Nickel Titanium Alloy Sputtering Target - Tungsten Silicide Pieces – Rich , The product will supply to all over the world, such as: Nepal, Hamburg, Paraguay, We guarantee that our company will try our best to reduce customer purchase cost , shorten the period of purchase , stable products quality , increase customers' satisfaction and achieve win-win situation .
  • The goods are very perfect and the company sales manager is warmful, we will come to this company to purchase next time.
    5 Stars By Judy from Armenia - 2018.12.14 15:26
    The customer service staff is very patient and has a positive and progressive attitude to our interest, so that we can have a comprehensive understanding of the product and finally we reached an agreement, thanks!
    5 Stars By Odelette from Hungary - 2018.09.08 17:09