Ụlọ ọrụ semiconductor na-ahụkarị okwu maka ihe ndị e lekwasịrị anya, nke nwere ike kewaa n'ime ihe wafer na ihe nkwakọ ngwaahịa. Ihe nkwakọ ngwaahịa nwere ihe mgbochi teknụzụ dị ala ma e jiri ya tụnyere ihe nrụpụta wafer. Usoro mmepụta nke wafers na-agụnyekarị ụdị 7 nke ihe semiconductor na kemịkalụ, gụnyere otu ụdị ihe e lekwasịrị anya sputtering. Ya mere, ihe bụ lekwasịrị ihe onwunwe? Gịnị mere ihe ezubere iche ji dị mkpa? Taa, anyị ga-ekwu banyere ihe ezubere iche ihe bụ!
Gịnị bụ ihe ezubere iche?
N'ikwu ya n'ụzọ dị mfe, ihe a na-achọsi ike bụ ihe a na-atụ anya ya bụ ihe ndị na-agba ọsọ na-agba ọsọ. Site n'iji dochie ihe dị iche iche ezubere iche (dịka aluminom, ọla kọpa, igwe anaghị agba nchara, titanium, nickel targets, wdg), enwere ike nweta usoro ihe nkiri dị iche iche (dịka superhard, wear-resistant, anti-corrosion alloy films, wdg).
Ka ọ dị ugbu a, (ịdị ọcha) nwere ike kewaa ihe ebumpụta ụwa n'ime:
1) Metal lekwasịrị anya (ọcha metal aluminum, titanium, ọla kọpa, tantalum, wdg)
2) Alloy lekwasịrị anya (nickel chromium alloy, nickel cobalt alloy, wdg)
3) Ihe mgbaru ọsọ seramiiki (oxides, silicides, carbides, sulfides, wdg).
Dị ka mgba ọkụ dị iche iche si dị, enwere ike kewaa ya: ogologo ebumnuche, square target, na okirikiri.
Dị ka dị iche iche ngwa ubi, ọ nwere ike ikewa n'ime: semiconductor mgbawa lekwasịrị, flat panel ngosi lekwasịrị, anyanwụ cell lekwasịrị, ozi nchekwa zaa, gbanwetụrụ, eletrọnịkị lekwasịrị, na ndị ọzọ zaa.
Site n'ile anya na nke a, ị kwesịrị ị nwetawo nghọta nke ihe mgbaru ọsọ na-agbapụta elu dị ọcha, yana aluminum, titanium, ọla kọpa, na tantalum ejiri mee ihe n'ichepụta ígwè. Na semiconductor wafer n'ichepụta, usoro aluminom na-abụkarị ụzọ bụ isi maka imepụta wafers 200mm (8 sentimita) na n'okpuru, na ihe ebumnuche ejiri bụ nke aluminom na ihe titanium. 300mm (12 inch) nrụpụta wafer, na-ejikarị teknụzụ njikọ njikọta ọla kọpa dị elu, na-ejikarị ọla kọpa na tantalum lekwasịrị anya.
Onye ọ bụla kwesịrị ịghọta ihe ebumnuche bụ. N'ozuzu, na ọnụ ọgụgụ na-arịwanye elu nke ngwa mgbawa na mmụba na-arịwanye elu na ahịa mgbawa, a ga-enwe mmụba nke ọchịchọ maka ihe metal anọ dị mkpa na ụlọ ọrụ ahụ, ya bụ aluminum, titanium, tantalum, na ọla kọpa. Ma ugbu a, ọ dịghị ihe ngwọta ọzọ nwere ike dochie anọ ndị a mkpa film metal ihe.
Oge nzipu: Jul-06-2023