Ihe nkiri dị mkpa na ebumnuche mkpuchi bụ ụdị ihe pụrụ iche. N'ebe a kapịrị ọnụ nke ọkpụrụkpụ, ọnụ ọgụgụ ahụ dị nnọọ obere, nke bụ ihe a na-atụ anya nke microscopic. Na mgbakwunye, n'ihi na ọdịdị na interface nke film ọkpụrụkpụ, ihe continuity akwụsị, nke na-eme ka film data na lekwasịrị data nwere dị iche iche nkịtị Njirimara.Na lekwasịrị bụ tumadi ojiji nke magnetron sputtering mkpuchi, Beijing Richmat's edither ga-eme ka anyị ghọta. ụkpụrụ na nkà nke mkpuchi sputtering.
一, Ụkpụrụ mkpuchi mkpuchi sputtering
Nkà mkpuchi mkpuchi ion bụ iji ọdịdị ion shelling, a na-akụtu atọm ezubere iche site na ihe a maara dị ka sputtering. Atọm nke edobere n'elu nke mkpụrụ a na-akpọ mkpuchi sputtering. N'ozuzu, gas ionization na-emepụta site na mwepu gas, na ion dị mma na-atụ bọmbụ cathode lekwasịrị anya na nnukwu ọsọ n'okpuru ọrụ nke ọkụ eletrik, na-egbutu atom ma ọ bụ molecules nke Cathode lekwasịrị anya, na-efe efe n'elu nke mkpụrụ osisi ka etinye ya na fim. N'ikwu ya n'ụzọ dị mfe, mkpuchi sputtering na-eji obere nrụgide inert gas na-egbuke egbuke iji mepụta. ions.
N'ozuzu, a na-eji ngwa ihe mkpuchi ihe nkiri na-agbapụta ihe nwere electrodes abụọ n'ime ụlọ na-ekpochapụ agụụ, na ihe mgbaru ọsọ cathode bụ nke mkpuchi mkpuchi. Ime ụlọ ahụ jupụtara na argon gas na nrụgide nke 0.1 ~ 10Pa. Glow ihapu emee na cathode n'okpuru omume nke adịghị mma elu voltaji nke 1 ~ 3kV dc ma ọ bụ rf voltaji nke 13.56mhz.Argon ions bombard lekwasịrị elu na-eme ka sputtered lekwasịrị atọm na imubanye na mkpụrụ.
二, Sputtering mkpuchi nkà e ji mara
1. Ngwa ngwa stacking ọsọ
Ihe dị iche n'etiti nnukwu magnetron sputtering electrode na omenala abụọ ogbo sputtering electrode bụ na a na-ahazi magnet n'okpuru ihe mgbaru ọsọ, ya mere oghere magnetik mechiri emechi na-apụta n'elu ihe mgbaru ọsọ ahụ. The lorentz ike na electrons bụ n'ebe etiti. nke dị iche iche magnetik. N'ihi mmetụta na-elekwasị anya, electrons na-agbanarị obere. Igwe ndọta dị iche iche na-aga gburugburu ebe a na-eche ihu, na electrons nke abụọ e weghaara na oghere magnetik dị iche iche na-adaba na ụmụ irighiri gas ugboro ugboro, nke na-eme ka ọnụ ọgụgụ mgbanwe dị elu nke ikuku gas dịkwuo mma. nwere ike nweta ezigbo mkpuchi mkpuchi, yana njirimara mwepụ dị mma.
2, The mkpụrụ okpomọkụ bụ ala
Ọsọ magnetron dị elu, nke a makwaara dị ka sputtering okpomọkụ dị ala. Ihe kpatara ya bụ na ngwaọrụ ahụ na-eji mwepu na oghere nke oghere electromagnetic na-adabere na ibe ya. Eletrọn nke abụọ nke na-eme na mpụga nke ebumnuche, na ibe ha. N'okpuru omume nke a ogologo electromagnetic field, ọ na-agbụ nso nke lekwasịrị n'elu na-akpali n'akụkụ runway na a okirikiri mpịakọta akara, ugboro ugboro na-akụ megide gas ụmụ irighiri ionize na gas ụmụ irighiri.Together, ndị electrons onwe ha nke nta nke nta hapụ ha ume, site na. bumps ugboro ugboro, ruo mgbe ike ha fọrọ nke nta ka ọ ghara ịla n'iyi tupu ha enwee ike ịgbanarị n'elu nke ihe mgbaru ọsọ dị nso na mkpụrụ. N'ihi na ike nke electrons dị ntakịrị, okpomọkụ nke ebumnuche anaghị ebili oke. Nke ahụ ezuola iji gbochie ịrị elu okpomọkụ nke mkpụrụ akụ sitere na bọmbụ elektrọn ike dị elu nke ogbugba diode nkịtị, nke na-emecha cryogenization.
3, A dịgasị iche iche nke akpụkpọ ahụ owuwu
Ọdịdị nke ihe nkiri ndị dị gịrịgịrị nke e nwetara site na ikuku evaporation na ntinye ntụtụ dị nnọọ iche na nke a na-enweta site n'itinye nnukwu ihe siri ike. N'adịghị ka ihe siri ike dị n'ozuzu ya, nke a na-ekewa dị ka otu ihe ahụ dị na akụkụ atọ, a na-ekewa ihe nkiri ndị a na-etinye na gas gas dị ka ihe dị iche iche. A na-eme ka ọganihu nke columnar nke ihe nkiri ahụ bụ site na mbụ convex elu nke mkpụrụ na ndò ole na ole n'ime akụkụ ndị a ma ama nke mkpụrụ ahụ. Otú ọ dị, udi na size nke kọlụm dị nnọọ iche n'ihi na mkpụrụ okpomọkụ, elu dispersion nke stacked atọm, olili nke adịghị ọcha atọm na merenụ Angle nke merenụ atọm ikwu na mkpụrụ n'elu. N'ime oke okpomọkụ dị elu, ihe nkiri ahụ dị mkpa nwere nhazi fibrous, njupụta dị elu, nke nwere kristal dị mma nke kọlụm, nke bụ ihe dị iche iche nke ihe nkiri na-agbapụta.
Nrụgide na-agbapụta na ọsọ nchịkọba ihe nkiri na-emetụtakwa nhazi nke ihe nkiri ahụ. N'ihi na ụmụ irighiri gas nwere mmetụta nke na-egbochi mgbasa nke atọm n'elu nke mkpụrụ osisi ahụ, mmetụta nke nrụgide dị elu na-adaba adaba maka mbelata okpomọkụ nke ihe nlereanya ahụ. Ya mere, enwere ike nweta ihe nkiri porous nwere ezi ọka na nrụgide dị elu. Nke a obere ọka size film adabara lubrication, eyi iguzogide, elu hardening na ndị ọzọ n'ibu ngwa.
4. Hazie mejupụtara evenly
Ngwakọta, ngwakọta, alloys, wdg, nke na-adabara ike na-ntekwasa site agụụ evaporation n'ihi na uzuoku mgbali nke components dị iche iche ma ọ bụ n'ihi na ha dị iche mgbe kpụ ọkụ n'ọnụ.Sputtering mkpuchi usoro bụ ime ka lekwasịrị elu oyi akwa nke atọm oyi akwa site oyi akwa. na mkpụrụ, na nke a n'echiche bụ a ọzọ zuru okè film eme nkà. Enwere ike iji ụdị ihe niile mee ihe na mmepụta mkpuchi ụlọ ọrụ site na sputtering.
Oge nzipu: Eprel-29-2022