Mkpuchi Vacuum na-ezo aka kpo oku na ikpochapụ isi iyi evaporation na oghere ma ọ bụ fesa ya na bọmbụ ion accelerated, na idobe ya n'elu nke mkpụrụ iji mepụta ihe nkiri otu oyi akwa ma ọ bụ multi-layer. Kedu ihe bụ ụkpụrụ mkpuchi mkpuchi agụụ? Ọzọ, onye nchịkọta akụkọ RSM ga-ewebata anyị ya.
1. Vacuum evaporation mkpuchi
Ihe mkpuchi evaporation na-achọ ka anya dị n'etiti mkpụrụ ndụ vapor ma ọ bụ atọm sitere na isi iyi evaporation na mkpụrụ nke a ga-ekpuchi kwesịrị ịbụ ihe na-erughị nkezi ụzọ efu nke mkpụrụ ndụ gas fọdụrụnụ n'ime ụlọ mkpuchi ahụ, iji hụ na molecule vepor nke evaporation nwere ike iru n'elu nke mkpụrụ na-enweghị nkukota. Gbaa mbọ hụ na ihe nkiri ahụ dị ọcha na nke siri ike, na evaporation agaghị oxidize.
2. Vacuum sputtering mkpuchi
Na agụụ, mgbe ion accelerated na-adaba na ihe siri ike, n'otu aka ahụ, kristal mebiri emebi, n'aka nke ọzọ, ha na-adaba na atom ndị mejupụtara kristal, na n'ikpeazụ atom ma ọ bụ ụmụ irighiri ihe dị n'elu nke siri ike. sputter apụta. A na-ekechi ihe ndị a wụsara n'elu mkpụrụ osisi ahụ iji mepụta ihe nkiri dị mkpa, nke a na-akpọ vacuum sputter plating. Enwere ọtụtụ ụzọ ịgbasa sputtering, n'ime nke diode sputtering bụ nke mbụ. Dị ka iche iche cathode lekwasịrị anya, ọ nwere ike kewaa n'ime kpọmkwem ugbu a (DC) na elu ugboro (RF). Ọnụọgụ nke atọm agbasara site n'itinye ion n'elu ezubere iche ka a na-akpọ ọnụego sputtering. Na elu sputtering ọnụego, ihe nkiri guzobe ọsọ bụ ngwa ngwa. Ọnụego sputtering metụtara ike na ụdị ion na ụdị ihe ezubere iche. N'ikwu okwu n'ozuzu, ọnụ ọgụgụ sputtering na-abawanye site na mmụba nke ike ion mmadụ, ọnụ ọgụgụ sputtering nke ọla dị oké ọnụ ahịa dị elu.
Oge nzipu: Jul-14-2022