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Ọmụma nlebara anya nke mgbasa sputtering

Ọtụtụ ndị enyi banyere mmezi nke lekwasịrị anya e nwere ọtụtụ ma ọ bụ na-erughị ajụjụ, na nso nso e nwekwara ọtụtụ ahịa consulting banyere mmezi nke lekwasịrị metụtara nsogbu, ka nchịkọta akụkọ nke RSM ka anyị na-eso banyere sputtering lekwasịrị mmezi ihe ọmụma .

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  Olee otú e kwesịrị isi na-edobe ebumnobi sputter?

  1. Ebumnuche mmezi

Iji zere obere sekit na arcing mere site na oghere na-adịghị ọcha na usoro sputtering, ọ dị mkpa ka oge na-ewepụ sputter na-agbakọba n'etiti na n'akụkụ abụọ nke egwu sputtering, nke na-enyere ndị ọrụ aka ịnọgide na-agbapụta na ike dị elu.

  2. Nchekwa ebumnuche

Anyị na-akwado ka ndị ọrụ na-echekwa ebumnuche (ma metal ma ọ bụ seramiiki) na nkwakọ ngwaahịa, ọkachasị ihe dabara adaba ga-echekwa ya na oghere iji gbochie oxidation nke oyi akwa dabara adaba na-emetụta ogo dabara adaba. N'ihe gbasara nkwakọba ebumnuche igwe, anyị na-atụ aro ka etinye ha na akpa rọba dị ọcha ọbụlagodi.

  3. Nzube ihicha

Nzọụkwụ mbụ bụ iji akwa dị nro na-enweghị lint na-ehicha ya na acetone;

Nzọụkwụ nke abụọ yiri nzọụkwụ mbụ, ihicha mmanya na-aba n'anya;

Nzọụkwụ 3: dị ọcha na mmiri deionized. Mgbe emechara ya na mmiri deionized, a na-etinye ihe mgbaru ọsọ ahụ na oven wee kpoo ya na 100 ℃ maka nkeji 30. A na-atụ aro ka iji “akwa akwa na-enweghị lint” hichaa ebumnuche oxide na seramiiki.

Nzọụkwụ nke anọ bụ ịsacha ihe mgbaru ọsọ na argon na nnukwu nrụgide na obere iru mmiri iji wepụ ihe ọ bụla adịghị ọcha nke nwere ike ime ka arc na usoro sputtering.

  4, Short sekit na tightness ego

Mgbe etinyere ihe mgbaru ọsọ ahụ, ọ dị mkpa ka a na-enyocha cathode dum maka obere sekit na tightness. A na-atụ aro ka ị kpee ikpe ma enwere obere sekit na cathode site na iji mita nguzogide na megger. Mgbe o kwusịrị na ọ dịghị obere sekit dị na cathode, enwere ike ịme nyocha nyocha mmiri, na mmiri nwere ike ịbanye na cathode iji chọpụta ma ọ dị mmiri mmiri.

  5. Nkwakọ ngwaahịa na njem

A na-akpakọba ebumnuche niile n'ime akpa rọba ekpuchiri oghere nke nwere ihe na-egbochi mmiri. Ngwungwu dị n'èzí bụ igbe osisi nwere oyi akwa mgbochi n'akụkụ iji chebe ebumnuche na ụgbọ elu azụ site na mmebi n'oge njem na nchekwa.


Oge nzipu: Jul-15-2022