Ebumnuche nwere ọtụtụ mmetụta, na ohere mmepe ahịa dị ukwuu. Ọ bara ezigbo uru n'ọtụtụ mpaghara. Ihe fọrọ nke nta ka ọ bụrụ ngwa sputter ọhụrụ ọ bụla na-eji magnets dị ike na-eme ka electrons spiral na-eme ka ionization nke argon dị gburugburu ihe mgbaru ọsọ, na-ebute mmụba na ohere nke nkwekọrịta n'etiti ion na argon ion. Ugbu a, ka anyị leba anya n'ọrụ ịgbasa ebumnobi na mkpuchi agụụ.
Melite ọnụego sputtering. Na mkpokọta, a na-eji sputtering DC maka mkpuchi igwe, ebe a na-eji sputtering RF AC maka ihe ndọta seramiiki anaghị arụ ọrụ. Ụkpụrụ bụ isi bụ iji mgbawa ọkụ na-akụ ion argon (AR) n'elu ebe a na-achọsi ike na oghere, na cations na plasma ga-agba ọsọ ọsọ gaa na electrode na-adịghị mma dị ka ihe na-agbapụ. Mmetụta a ga-eme ka ihe ndị e lekwasịrị anya na-efepụ ma tinye ya na mkpụrụ iji mepụta ihe nkiri.
N'ikwu okwu n'ozuzu, enwere ọtụtụ njirimara nke mkpuchi ihe nkiri site na usoro sputtering: (1) metal, alloy ma ọ bụ insulator nwere ike mee ka ọ bụrụ data ihe nkiri.
(2) N'okpuru ọnọdụ ntọala kwesịrị ekwesị, ihe nkiri ahụ nwere otu ihe ahụ nwere ike ime site na ọtụtụ ebumnuche na mgbagwoju anya.
(3) Enwere ike imepụta ngwakọta ma ọ bụ ngwakọta nke ihe ezubere iche na ụmụ irighiri gas site na ịgbakwụnye oxygen ma ọ bụ gas ndị ọzọ na-arụ ọrụ na ikuku ikuku.
(4) Enwere ike ịchịkwa ntinye ntinye nke ugbu a na oge sputtering, ọ dịkwa mfe ịnweta ọkpụrụkpụ ihe nkiri dị elu.
(5) E jiri ya tụnyere usoro ndị ọzọ, ọ na-enyere aka ịmepụta ihe nkiri edo edo buru ibu.
(6) The sputtered ahụ na-fọrọ nke nta ka ike ndọda emetụtaghị, na ọnọdụ nke lekwasịrị na mkpụrụ nwere ike hazie n'efu.
Oge nzipu: Mee-17-2022