Ọmụmụ ihe ọhụrụ na akwụkwọ akụkọ Diamond na ihe ndị metụtara ya na-elekwasị anya na etching nke polycrystalline diamond na FeCoB etchant iji mepụta ụkpụrụ. N'ihi teknụzụ ọgbara ọhụrụ ndị a emelitere, enwere ike nweta elu diamond na-enweghị mmebi yana enweghị ntụpọ ole na ole.
Nchoputa: Nhọrọ nke ola diamond na steeti siri ike na-eji FeCoB nwere usoro fotolithographic. Ebe e si nweta foto: Bjorn Wilezic/Shutterstock.com
Site na usoro mgbasa ozi steeti siri ike, ihe nkiri FeCoB nanocrystalline (Fe: Co: B = 60: 20: 20, nha atomic) nwere ike nweta ebumnuche lattice na mkpochapụ nke diamond na microstructure.
Ola diamond nwere àgwà biochemical na ihe a na-ahụ anya pụrụ iche, yana nkwụ na ike dị elu. Oke ịdịte aka ya bụ isi mmalite dị mkpa na-enwe ọganihu n'ịrụ ọrụ nke ọma (teknụzụ na-atụgharị diamond) yana ụzọ nrụgide siri ike dị na nso nke narị narị GPa.
Enweghi ike kemịkalụ, ịdịte anya anya na ọrụ ndu na-abawanye ohere imewe nke sistemu na-eji njirimara arụ ọrụ ndị a. Diamond emeela onwe ya aha n'ọhịa nke mechatronics, optics, sensọ na njikwa data.
Iji mee ka ngwa ha nwee ike, njikọta nke diamond na ụkpụrụ ha na-emepụta nsogbu doro anya. Ion etching reactive (RIE), plasma inductively jikọtara ọnụ (ICP), na eletrọn beam induced etching bụ ihe atụ nke usoro usoro dị na-eji usoro etching (EBIE).
A na-emepụtakwa ihe owuwu diamond site na iji usoro nhazi laser na lekwasịrị anya ion beam (FIB). Ebumnuche nke usoro mmepụta a bụ iji mee ka delamination dịkwuo ngwa yana ikwe ka ịsawanye ebe buru ibu na nhazi mmepụta ihe. Usoro ndị a na-eji etchants mmiri (plasma, gas, na mmiri mmiri ngwọta), nke na-egbochi mgbagwoju anya geometric enwere ike iru.
Ọrụ mgbawa a na-amụ banyere ablation ihe site na ọgbọ vapor kemịkalụ wee mepụta diamond polycrystalline na FeCoB (Fe:Co:B, 60:20:20 atomic percent) n'elu. A na-akwụ ụgwọ kachasị maka ịmepụta ụdị TM maka nhazi nke ọma nke ihe owuwu mita na diamond. A na-ejikọta diamond dị n'okpuru na nanocrystalline FeCoB site na ọgwụgwọ okpomọkụ na 700 ruo 900 Celsius maka nkeji 30 ruo 90.
Ihe oyi akwa adịghị emebi emebi nke ihe nlele diamond na-egosi microstructure polycrystalline dị n'okpuru. The roughness (Ra) n'ime nke ọ bụla kpọmkwem urughuru bụ 3.84 ± 0.47 nm, na ngụkọta elu roughness bụ 9.6 ± 1.2 nm. Ihe siri ike (n'ime otu ọka diamond) nke oyi akwa FeCoB etinyere bụ 3.39 ± 0.26 nm, na elu oyi akwa bụ 100 ± 10 nm.
Mgbe annealing na 800 ° C maka 30 min, metal elu ọkpụrụkpụ na-abawanye ruo 600 ± 100 nm, na elu roughness (Ra) na-abawanye na 224 ± 22 nm. N'oge annealing, carbon carbon na-agbasa n'ime oyi akwa FeCoB, na-ebute mmụba na nha.
A na-ekpo ọkụ n'ụdị atọ nwere akwa FeCoB 100 nm na okpomọkụ nke 700, 800, na 900 Celsius, n'otu n'otu. Mgbe oke okpomọkụ dị n'okpuru 700 Celsius C, enweghị njikọ dị ịrịba ama n'etiti diamond na FeCoB, na obere ihe na-ewepụ mgbe ọgwụgwọ hydrothermal gasịrị. A na-akwalite mwepụ ihe onwunwe ruo na okpomọkụ karịrị 800 Celsius.
Mgbe okpomọkụ ahụ ruru 900 Celsius, ọnụ ọgụgụ etching mụbara ugboro abụọ ma e jiri ya tụnyere okpomọkụ nke 800 Celsius. Agbanyeghị, profaịlụ nke mpaghara etched dị nnọọ iche na nke usoro etch etinyere (FeCoB).
Ngosipụta nleba anya nke steeti siri ike wee mepụta ụkpụrụ: Nhọrọ nke steeti siri ike na-etching nke diamond na-eji fotolithographically FeCoB. Ebe e si nweta foto: Van Z. na Shankar MR et al., diamond na ihe ndị metụtara ya.
A na-ahazi ihe nlele FeCoB 100 nm gbara ọkpụrụkpụ na diamond na 800°C maka nkeji 30, 60 na 90, n'otu n'otu.
A na-ekpebi ihe siri ike (Ra) nke ebe a kanyere akara dịka ọrụ nke oge nzaghachi na 800 ° C. Ike nke samples mgbe annealing maka 30, 60 na 90 nkeji bụ 186 ± 28 nm, 203 ± 26 nm na 212 ± 30 nm, n'otu n'otu. Site na omimi etch nke 500, 800, ma ọ bụ 100 nm, oke (RD) nke ebe siri ike nke mpaghara a kanyere na omimi etch bụ 0.372, 0.254, na 0.212, n'otu n'otu.
Ihe siri ike nke mpaghara etched adịghị abawanye nke ukwuu site n'ịbawanye omimi etching. Achọpụtala na ọnọdụ okpomọkụ a chọrọ maka mmeghachi omume n'etiti diamond na HM etchant karịrị 700 ° C.
Nsonaazụ nke ọmụmụ ahụ na-egosi na FeCoB nwere ike wepu ola diamond n'ụzọ dị oke ọsọ karịa Fe ma ọ bụ Co naanị.
Oge nzipu: Ọgọst-31-2023