Nkewa na ngwa nke Magnetron sputtering Targets

　　1. Magnetron sputtering usoro:

Enwere ike kewaa sputtering Magnetron ka ọ bụrụ sputtering DC, ịgbasa ugboro ugboro na RF sputtering.

A. DC sputtering ike ọkọnọ dị ọnụ ala na njupụta nke ihe nkiri echekwabara adịghị mma. N'ozuzu, a na-eji batrị fotothermal na ihe nkiri dị obere na-eji ike dị ala, na ebumnuche ịgbasa bụ ebumnuche ígwè.

B. Ike sputtering RF dị elu, na ebumnuche sputtering nwere ike ịbụ ebumnuche na-adịghị eduzi ma ọ bụ ebumnuche na-eduzi.

C. Ebumnobi na-agbapụ n'ọkara nwere ike ịbụ ebumnuche seramiiki ma ọ bụ ebumnuche ọla.

　　2. Nhazi na ntinye nke ebumnuche sputtering

Enwere ọtụtụ ụdị ebumpụta ụwa, na usoro nkewa ebumnuche dịkwa iche. Dị ka ọdịdị ahụ si dị, a na-ekewa ha n'ime ogologo ebumnuche, square target na gburugburu ebe; Dị ka ihe mejupụtara ya si dị, enwere ike kewaa ya na ebumnuche ọla, ebumnuche alloy na ebumnuche seramiiki; Dị ka dị iche iche ngwa ubi, ọ nwere ike kewara n'ime semiconductor metụtara seramiiki zaa, ndekọ ọkara seramiiki zaa, ngosi seramiiki zaa, wdg sputtering zaa na-tumadi-eji na electronic na ozi ụlọ ọrụ, dị ka ozi nchekwa ụlọ ọrụ. N'ime ụlọ ọrụ a, a na-eji sputtering lekwasịrị anya iji kwadebe ngwaahịa ihe nkiri dị mkpa ( diski ike, isi magnetik, diski anya, wdg). Ugbu a. Site na mmepe nke ụlọ ọrụ ozi na-aga n'ihu, ọchịchọ maka ịdekọ ebumnuche seramiiki ọkara n'ahịa na-abawanye. Nchọpụta na mmepụta nke ndekọ ihe mgbaru ọsọ na-emepe emepe aghọwo ihe a na-elekwasị anya nke ukwuu.