AlTi alloy Sputtering Target High ịdị ọcha
Aluminium Titanium
Ihe achọrọ nke ebumnuche ebumnuche maka mkpuchi sputter dị elu karịa nke ụlọ ọrụ ihe ọdịnala. Microstructure otu nke ebumnuche na-emetụta arụmọrụ sputtering ozugbo. Anyị nwere usoro njikwa mma zuru oke ma anyị na-ahọrọ akụrụngwa dị ọcha ma gwakọta ha nke ọma iji hụ na ịdị n'otu. A na-emepụta ebumnuche aluminom Titanium alloy sputtering site na iji usoro ịpị ọkụ ọkụ.
Ebumnuche anyị nke aluminom Titanium sputtering nwere ike inye mkpuchi nitride na-eguzogide oxidation pụtara ìhè, Titanium aluminum nitride (TiAlN). TiAlN bụ isi ihe dị ugbu a dị ka ihe nkiri maka ịkpụ ngwaọrụ, akụkụ slide na mkpuchi tribo. Ọ nwere nnukwu isi ike, ike siri ike, ịrụ ọrụ na-eguzogide ọgwụ na okpomọkụ oxidation.
Ebumnuche AlTi anyị na-ahụkarị na akụrụngwa ha
| Ti-75Al na% | Ti-70Al na% | Ti-67Al na% | Ti-60Al na% | Ti-50Al na% | Ti-30Al na% | Ti-20Al na% | Ti-14Al na% | |
| Ịdị ọcha (%) | 99.7 | 99.7 | 99.7 | 99.7 | 99.8/99.9 | 99.9 | 99.9 | 99.9 |
| Njupụta(g/cm3) | 3.1 | 3.2 | 3.3 | 3.4 | 3.63/3.85 | 3.97 | 4.25 | 4.3 |
| Gmmiri ozuzo Nha(µm) | 100 | 100 | 100 | 100 | 100/- | - | - | - |
| Usoro | HIP | HIP | HIP | HIP | HIP/VAR | VAR | VAR | VAR |
Ọgaranya ihe pụrụ iche pụrụ iche na nrụpụta nke Sputtering Target ma nwee ike imepụta ihe na-agbapụta Aluminom Titanium dị ka nkọwa ndị ahịa si dị. Anyị nwere ike ịnye ụdị ụdị geometric dị iche iche: tubes, arc cathodes, planar ma ọ bụ nke a na-eme omenala, yana oke nke Aluminom. Ngwaahịa anyị nwere ihe eji arụ ọrụ dị mma, microstructure dị n'otu, elu a na-egbuke egbuke na-enweghị nkewa, pores ma ọ bụ mgbawa. Maka ozi ndị ọzọ, biko kpọtụrụ anyị.
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