Tungsten Silicide Pieces
Tungsten Silicide Pieces
Tungsten silicide WSi2 yog siv los ua cov khoom siv hluav taws xob hauv microelectronics, shunting ntawm polysilicon xov hlau, anti-oxidation txheej thiab tiv thaiv hlau txheej. Tungsten silicide yog siv los ua cov khoom sib txuas hauv microelectronics, nrog rau kev tiv thaiv ntawm 60-80μΩcm. Nws yog tsim ntawm 1000 ° C. Nws feem ntau yog siv los ua shunt rau polysilicon kab los ua kom nws cov conductivity thiab nce teeb liab ceev. Cov txheej tungsten Silicide tuaj yeem npaj los ntawm cov tshuaj vapor deposition, xws li vapor deposition. Siv monosilane lossis dichlorosilane thiab tungsten hexafluoride ua cov khoom siv roj. Cov yeeb yaj kiab tso tawm tsis yog-stoichiometric thiab yuav tsum tau ua kom hloov pauv mus rau hauv daim ntawv stoichiometric ntau dua.
Tungsten silicide tuaj yeem hloov cov tungsten zaj duab xis ua ntej. Tungsten silicide kuj tseem siv los ua ib txheej txheej ntawm silicon thiab lwm yam hlau.
Tungsten silicide kuj tseem ceeb heev hauv microelectromechanical systems, ntawm cov tungsten silicide feem ntau yog siv los ua ib zaj duab xis nyias rau kev tsim microcircuits. Rau lub hom phiaj no, tungsten silicide zaj duab xis tuaj yeem siv plasma-etched, piv txwv li, silicide.
| Yam khoom | Tshuaj muaj pes tsawg leeg | |||||
| Element | W | C | P | Fe | S | Si |
| Cov ntsiab lus (wt%) | 76.22 ib | 0.01 ib | 0.001 ib | 0.12 | 0.004 ib | Tshuav |
Cov khoom siv nplua nuj tshwj xeeb tshwj xeeb hauv Chaw Tsim Khoom ntawm Sputtering Target thiab tuaj yeem tsim Tungsten Silicidedaimraws li cov neeg siv khoom specifications. Yog xav paub ntxiv, thov hu rau peb.
