Raws li peb txhua tus paub, cov txheej txheem uas nquag siv hauv lub tshuab nqus tsev yog lub tshuab nqus tsev vacuum thiab ion sputtering. Dab tsi yog qhov txawv ntawm cov txheej txheem transpiration thiab sputtering txheej ntauneeg muaj lus nug. Cia peb qhia koj txog qhov sib txawv ntawm cov txheej txheem transpiration thiab sputtering txheej
Lub tshuab nqus tsev transpiration zaj duab xis yog ua kom sov cov ntaub ntawv kom hloov mus rau qhov kub thiab txias los ntawm kev tiv thaiv cua sov lossis hluav taws xob thiab laser shelling nyob rau hauv ib puag ncig nrog lub tshuab nqus tsev kawm ntawv tsis pub tsawg tshaj 10-2Pa, kom lub thermal vibration zog ntawm molecules los yog atoms nyob rau hauv cov ntaub ntawv tshaj lub binding zog ntawm qhov chaw, kom ntau molecules los yog atoms transpiration los yog nce, thiab ncaj qha tso rau lawv nyob rau hauv lub substrate los tsim ib tug zaj duab xis. Ion sputtering txheej siv lub siab remonstrance zog ntawm zoo ions generated los ntawm cov pa paug nyob rau hauv cov nyhuv ntawm hluav taws xob teb los bombard lub hom phiaj raws li lub cathode, thiaj li hais tias cov atoms los yog molecules nyob rau hauv lub hom phiaj khiav tawm thiab tso rau saum npoo ntawm plated workpiece tsim. xav tau zaj duab xis.
Txoj kev siv ntau tshaj plaws ntawm lub tshuab nqus tsev transpiration txheej yog kev tiv thaiv cua sov. Nws qhov zoo yog cov qauv yooj yim ntawm cov cua sov qhov chaw, tus nqi qis thiab kev ua haujlwm yooj yim. Nws qhov tsis zoo yog tias nws tsis haum rau cov hlau refractory thiab kub resistant media. Electron beam cua sov thiab laser cua sov tuaj yeem kov yeej qhov tsis zoo ntawm cov cua sov ua haujlwm. Hauv hluav taws xob hluav taws xob cua sov, lub teeb tsom hluav taws xob siv hluav taws xob ncaj qha rau cov ntaub ntawv plhaub, thiab lub zog hluav taws xob ntawm cov hluav taws xob hluav taws xob ua hluav taws xob los ua cov ntaub ntawv hloov pauv. Laser cua sov siv high-power laser raws li cov cua kub qhov chaw, tab sis vim hais tias ntawm high-power lasers, nws tsuas yog siv nyob rau hauv ib tug me me ntawm cov kev tshawb fawb chaw soj nstuam.
Sputtering txuj ci yog txawv ntawm kev nqus nqus pa. Sputtering yog hais txog qhov tshwm sim uas tau them cov khoom tawg rov qab rau saum npoo (lub hom phiaj) ntawm lub cev, kom cov khoom atoms lossis cov molecules tawm ntawm qhov chaw. Feem ntau ntawm cov emissions yog atomic, uas feem ntau hu ua sputtered atoms. Sputtered particles siv rau lub hom phiaj shelling tuaj yeem yog cov khoom siv hluav taws xob, ions lossis cov khoom nruab nrab. Vim tias ions yooj yim kom tau txais lub zog kinetic xav tau nyob rau hauv hluav taws xob, ions feem ntau yog xaiv raws li cov khoom sib tsoo.
Cov txheej txheem sputtering yog ua raws li kev tso tawm glow, uas yog, sputtering ions los ntawm cov pa tawm. Txawv sputtering txuj ci muaj txawv glow discharge txoj kev. DC diode sputtering siv DC glow tawm; Triode sputtering yog lub teeb ci ntsa iab txhawb los ntawm kub cathode; RF sputtering siv RF glow paug; Magnetron sputtering yog ib qho hluav taws xob tso tawm los ntawm ib qho chaw sib nqus sib nqus.
Piv nrog lub tshuab nqus tsev transpiration txheej, sputtering txheej muaj ntau yam zoo. Yog hais tias tej yam khoom yuav sputtered, tshwj xeeb tshaj yog cov ntsiab lus thiab cov tebchaw uas muaj melting point thiab tsawg vapor siab; Lub adhesion ntawm sputtered zaj duab xis thiab substrate yog zoo; High zaj duab xis ceev; Cov yeeb yaj kiab tuab tuaj yeem tswj tau thiab rov ua dua tau zoo. Qhov tsis zoo yog tias cov cuab yeej siv tau yooj yim thiab xav tau cov khoom siv hluav taws xob siab.
Tsis tas li ntawd, kev sib xyaw ua ke ntawm txoj kev transpiration thiab sputtering txoj kev yog ion plating. Qhov zoo ntawm txoj kev no yog muaj zog adhesion ntawm zaj duab xis thiab substrate, siab deposition tus nqi thiab siab ceev ntawm cov zaj duab xis.
Post lub sij hawm: May-09-2022