Tam sim no, yuav luag tag nrho cov high-end ultra-high purity hlau tooj liab lub hom phiaj xav tau los ntawm IC kev lag luam yog monopolized los ntawm ntau lub tuam txhab txawv teb chaws loj. Txhua lub hom phiaj tooj liab ultrapure xav tau los ntawm kev lag luam IC hauv tsev yuav tsum tau xa tuaj, uas tsis yog kim xwb, tab sis kuj nyuaj rau cov txheej txheem ntshuam Yog li ntawd, Tuam Tshoj xav tau ceev nrooj los txhim kho kev txhim kho thiab kev txheeb xyuas ntawm ultra-high purity (6N) tooj liab sputtering lub hom phiaj. . Cia peb saib cov ntsiab lus tseem ceeb thiab teeb meem hauv kev txhim kho ultra-high purity (6N) tooj liab sputtering lub hom phiaj.
1,Kev loj hlob ntawm cov khoom siv ultra siab purity
Lub tshuab purification ntawm high-purity Cu, Al thiab Ta hlau nyob rau hauv Tuam Tshoj yog deb ntawm qhov uas nyob rau hauv industrial tsim lub teb chaws. Tam sim no, feem ntau ntawm cov high-purity hlau uas yuav muab tau tsis tau raws li qhov yuav tsum tau zoo ntawm integrated circuits rau sputtering lub hom phiaj raws li cov pa txhua yam kev tsom xam txoj kev nyob rau hauv kev lag luam. Tus naj npawb ntawm kev suav nrog hauv lub hom phiaj yog siab dhau lossis tsis sib xws. Cov khoom feem ntau yog tsim los ntawm wafer thaum lub sij hawm sputtering, ua rau luv luv Circuit Court los yog qhib Circuit Court ntawm kev sib txuas, uas cuam tshuam rau kev ua tau zoo ntawm cov yeeb yaj kiab.
2,Txoj kev loj hlob ntawm tooj liab sputtering phiaj npaj technology
Txoj kev loj hlob ntawm tooj liab sputtering lub hom phiaj npaj thev naus laus zis feem ntau tsom rau peb yam: grain loj, kev tswj kev taw qhia thiab kev sib xws. Kev lag luam semiconductor muaj qhov xav tau siab tshaj plaws rau sputtering lub hom phiaj thiab evaporating raw khoom. Nws muaj cov kev cai nruj heev rau kev tswj hwm ntawm qhov loj ntawm qhov loj thiab siv lead ua orientation ntawm lub hom phiaj. Qhov luaj li cas ntawm lub hom phiaj yuav tsum tau tswj ntawm 100μ M hauv qab no, yog li ntawd, kev tswj ntawm cov qoob loo loj thiab txhais tau tias kev txheeb xyuas kev sib raug zoo thiab kev tshawb nrhiav yog qhov tseem ceeb heev rau kev txhim kho cov phiaj xwm hlau.
3,Kev txhim kho ntawm kev tsom xam thiabkuaj tshuab
Lub siab purity ntawm lub hom phiaj txhais tau tias txo cov impurities. Yav dhau los, inductively coupled plasma (ICP) thiab atomic absorption spectrometry tau siv los txiav txim siab impurities, tab sis nyob rau hauv xyoo tas los no, glow discharge quality tsom xam (GDMS) nrog siab rhiab heev tau maj mam siv raws li tus qauv. txoj kev. Cov residual resistance ratio RRR txoj kev yog tsuas yog siv rau kev txiav txim ntawm hluav taws xob purity. Nws txoj kev txiav txim siab yog los ntsuas qhov purity ntawm lub hauv paus hlau los ntawm kev ntsuas qhov degree ntawm hluav taws xob dispersion ntawm impurities. Vim hais tias nws yog los ntsuas qhov tsis kam ntawm chav tsev kub thiab kub tsis tshua muaj, nws yog qhov yooj yim rau kev coj tus lej. Nyob rau hauv xyoo tas los no, txhawm rau tshawb nrhiav cov ntsiab lus ntawm cov hlau, kev tshawb fawb ntawm ultra-siab purity yog heev nquag. Hauv qhov no, tus nqi RRR yog qhov zoo tshaj plaws los ntsuas qhov purity.
Post lub sij hawm: May-06-2022