Ke koi makeke no nā pahu hoʻoheheʻe metala i hoʻohana ʻia i ka ʻoihana hōʻike papa pālahalaha

ʻO ka ʻenehana hōʻikeʻike papa pālahalaha kiʻi ʻoniʻoni lahilahi transistor wai i kēia manawa, a ʻo nā pahu sputtering metala kekahi o nā mea koʻikoʻi i ka hana hana. I kēia manawa, ʻo ke koi no nā pahu sputtering metala i hoʻohana ʻia i nā laina hana LCD panel mainstream ma Kina ka mea kiʻekiʻe loa no nā ʻano pahuhopu ʻehā: aluminika, keleawe, molybdenum, a me ka molybdenum niobium alloy. E ʻae mai iaʻu e hoʻolauna i ka makemake o ka mākeke no nā pahu pahu metala ma ka ʻoihana hōʻike pālahalaha.

1, Aluminum pahu hopu

I kēia manawa, ʻo nā pahu alumini i hoʻohana ʻia i loko o ka ʻoihana hōʻike aniani wai wai i hoʻomalu nui ʻia e nā ʻoihana Iapana.

2、 Pahu keleawe

Ma ke ʻano o ka ulu ʻana o ka ʻenehana sputtering, ua piʻi mālie ka nui o ka noi no nā pahu keleawe. Eia kekahi, i kēia mau makahiki i hala iho nei, ua hoʻonui mau ʻia ka nui o ka mākeke o ka ʻoihana hōʻike kristal wai kūloko. No laila, e hoʻomau ka noi no nā pahu keleawe i ka ʻoihana hōʻike papa pālahalaha e hōʻike i kahi ʻano piʻi.

3、 Laulā molybdenum pahu hopu

E pili ana i nā ʻoihana ʻē aʻe: ʻO nā ʻoihana haole e like me Panshi a me Shitaike ke hoʻomalu nei i ka mākeke pahuhopu molybdenum ākea ākea. Hana ʻia ma ka home: Ma ka hopena o 2018, ua hoʻohana ʻia nā pahuhopu molybdenum ākea ākea i ka hana ʻana i nā paneli hōʻike aniani wai.

4、 Molybdenum niobium 10 pahu pahu pahu

ʻO ka molybdenum niobium 10 alloy, ma ke ʻano he mea hoʻololi koʻikoʻi no ka molybdenum aluminika molybdenum i loko o ka diffusion barrier layer o nā transistors kiʻiʻoniʻoni lahilahi, loaʻa kahi manaʻo koi mākeke. Eia nō naʻe, ma muli o ka ʻokoʻa nui o ka coefficient diffusion like ma waena o ka molybdenum a me ka niobium atoms, e hoʻokumu ʻia nā pores nui i ke kūlana o nā ʻāpana niobium ma hope o ka sintering kiʻekiʻe, e paʻakikī ai ka hoʻomaikaʻi ʻana i ka nui o ka sintering. Eia kekahi, e hoʻokumu ʻia ka hoʻoikaika paʻa paʻa ikaika ma hope o ka hoʻolaha piha ʻana o nā molybdenum a me nā niobium atoms, e alakaʻi ana i ka hōʻino ʻana o kā lākou hana ʻōwili. Eia nō naʻe, ma hope o nā hoʻokolohua he nui a me nā holomua, ua ʻōwili maikaʻi ʻia i ka makahiki 2017 me ka ʻike oxygen ma lalo o 1000 × A Mo Nb alloy target billet me ka nui o 99.3%.