1. ʻO ke ala hoʻoheheʻe Magnetron:
Hiki ke hoʻokaʻawale ʻia ka Magnetron sputtering i DC sputtering, medium frequency sputtering a me RF sputtering
A. DC sputtering mana lako mea maʻalahi a me ka mānoanoa o waiho kiʻiʻoniʻoni ua ilihune. ʻO ka mea maʻamau, hoʻohana ʻia nā ʻeke kiʻi ʻoniʻoni ʻoniʻoni a me ka ikehu haʻahaʻa, a ʻo ka pahuhopu sputtering ʻo ia ka pahuhopu metala conductive.
B. He kiʻekiʻe ka ikehu RF sputtering, a hiki i ka pahu sputtering ke lilo i ʻole conductive target a i ʻole conductive target.
C. Medium frequency sputtering pahu hopu hiki ke ceramic pahu hopu a metala pahu hopu.
2. Hoʻohui a me ka hoʻohana ʻana i nā pahuhopu sputtering
Nui nā ʻano o ka sputtering targets, a ʻokoʻa hoʻi ke ʻano o ka hoʻokaʻawale ʻana. Wahi a ke ʻano, ua māhele ʻia lākou i ka pahu lōʻihi, ka pahu pahu a me ka pahu pahu; Wahi a ka haku mele, hiki ke hoʻokaʻawale ʻia i ka pahu metala, ka pahu pahu a me ka pahu hoʻohui ceramic; Wahi a nā ʻano noiʻi like ʻole, hiki ke hoʻokaʻawale ʻia i nā semiconductor e pili ana i ka ceramic targets, ka hoʻopaʻa ʻana i nā pahu ceramic medium, hōʻike i nā pahu ceramic, a me nā mea ʻē aʻe. Ma kēia ʻoihana, hoʻohana ʻia nā pahuhopu sputtering no ka hoʻomākaukau ʻana i nā huahana kiʻiʻoniʻoni lahilahi (hard disk, magnetic head, optical disc, etc.). I kēia manawa. Me ka hoʻomau mau ʻana o ka ʻoihana ʻike, ke hoʻonui nei ka noi no ka hoʻopaʻa ʻana i nā mea hoʻopaʻa ceramic medium i ka mākeke. ʻO ka noiʻi a me ka hana ʻana o ka hoʻopaʻa ʻana i nā pahuhopu waena ua lilo i mea nānā nui.
Ka manawa hoʻouna: Mei-11-2022