ʻO ka nānā pono ʻana i ka ʻenehana deposition film thin

Ke hoʻomau nei nā kiʻiʻoniʻoni lahilahi i ka manaʻo o nā mea noiʻi. Hōʻike kēia ʻatikala i nā noiʻi ʻoi aku ka hohonu o kā lākou noi, nā ʻano hoʻololi hoʻololi, a me nā hoʻohana e hiki mai ana.
ʻO ka "Film" kahi huaʻōlelo pili no kahi mea ʻelua-dimensional (2D) ʻoi aku ka lahilahi ma mua o kona pani, inā paha i manaʻo ʻia e uhi i ke pani a i ʻole e hoʻopili ʻia ma waena o nā ʻili ʻelua. Ma nā noi ʻenehana o kēia manawa, ʻo ka mānoanoa o kēia mau kiʻi ʻoniʻoni ʻoniʻoni maʻamau mai ka sub-nanometer (nm) atomic dimensions (ie, <1 nm) a i kekahi mau micrometers (μm). ʻO ka graphene papa hoʻokahi ka mānoanoa o hoʻokahi ʻātoma kalapona (ie ~0.335 nm).
Ua hoʻohana ʻia nā kiʻiʻoniʻoni no nā mea hoʻonaninani a me nā kiʻi i ka wā prehistoric. I kēia lā, ua uhi ʻia nā mea nani a me nā mea nani me nā kiʻiʻoniʻoni lahilahi o nā metala makamae e like me ke keleawe, ke kālā, ke gula a me ka platinum.
ʻO ka hoʻohana maʻamau o nā kiʻiʻoniʻoni ʻo ia ka pale kino o nā ʻili mai ka abrasion, ka hopena, nā ʻōpala, ka erosion a me nā abrasions. Hoʻohana ʻia nā ʻāpana kalapona e like me Diamond (DLC) a me MoSi2 no ka pale ʻana i nā ʻenekini kaʻa mai ka ʻaʻahu ʻana a me ka corrosion wela kiʻekiʻe ma muli o ka hakakā ma waena o nā ʻāpana neʻe mechanical.
Hoʻohana ʻia nā kiʻiʻoniʻoni lahilahi no ka pale ʻana i nā wahi reactive mai ke kaiapuni, inā he oxidation a hydration paha ma muli o ka makū. Ua loaʻa ka manaʻo nui o nā kiʻi ʻoniʻoni pale pale i nā ʻāpana o nā mea semiconductor, nā mea hoʻokaʻawale kiʻi dielectric, nā electrodes kiʻiʻoniʻoni lahilahi, a me ka interference electromagnetic (EMI). ʻO ka mea nui, loaʻa nā transistors metala oxide field effect transistors (MOSFET) i nā kiʻiʻoniʻoni dielectric chemically a thermally stable e like me SiO2, a me nā mea hoʻohui metala oxide semiconductors (CMOS) i loaʻa nā kiʻiʻoniʻoni keleawe conductive.
Hoʻonui nā electrodes kiʻiʻoniʻoni i ka lakio o ka ikehu i ka nui o nā supercapacitors i nā manawa he nui. Eia kekahi, hoʻohana nui ʻia nā kiʻi ʻoniʻoni ʻoniʻoni metala a me nā MXenes (transition metal carbide, nitrides a carbonitrides) i kēia manawa no ka pale ʻana i nā mea uila mai ka hoʻopili electromagnetic.
I ka PVD, ua hoʻoneʻe ʻia ka mea i hoʻopaʻa ʻia a hoʻoneʻe ʻia i kahi keʻena ʻūhā i loko o ka substrate. Hoʻomaka ka mahu e waiho ma ka ʻili o ka substrate ma muli o ka condensation. ʻAʻole ka ʻākea i ka hui ʻana o nā haumia a me nā hui ʻana ma waena o nā molekele mahu a me nā molekole kinoea koena.
ʻO ka haunaele i hoʻokomo ʻia i loko o ka mahu, ka ʻemi wela, ka kahe kahe o ka mahu, a me ka wela huna o ka mea i hoʻopaʻa ʻia he mea nui i ka hoʻoholo ʻana i ka like ʻana o ke kiʻiʻoniʻoni a me ka manawa hana. ʻO nā ʻano hana hoʻoheheʻe ʻia me ka hoʻomehana kū'ē, ka hoʻomehana ʻana o ke kukuna electron a, ka mea hou aku, epitaxy beam molecular.
ʻO nā hemahema o ka PVD maʻamau, ʻo ia ka hiki ʻole ke hoʻoheheʻe i nā mea hoʻoheheʻe kiʻekiʻe loa a me nā hoʻololi ʻana i hoʻololi ʻia i loko o ka mea i waiho ʻia ma muli o ke kaʻina hana evaporation-condensation. ʻO Magnetron sputtering ʻo ia ke ʻano hana deposition kino e hiki mai ana e hoʻoponopono i kēia mau pilikia. I ka hoʻoheheʻe ʻana o ka magnetron, ua hoʻokuʻu ʻia nā molekole i loaʻa (sputtered) e ka pahu me nā iona maikaʻi ikaika ma o ke kahua magnetic i hana ʻia e kahi magnetron.
Noho nā kiʻi ʻoniʻoni ʻoniʻoni i kahi wahi kūikawā i ka uila uila, optical, mechanical, photonic, thermal and magnetic device a me nā mea hoʻonaninani ma muli o kā lākou versatility, compactness a me nā waiwai hana. ʻO PVD a me CVD ka mea maʻamau i hoʻohana ʻia no ka hoʻopuka ʻana i nā kiʻiʻoniʻoni lahilahi mai ka mānoanoa mai kekahi mau nanometer a i kekahi mau micrometers.
ʻO ka morphology hope loa o ke kiʻi i waiho ʻia e pili ana i kāna hana a me ka pono. Eia nō naʻe, pono e noiʻi hou ʻia nā ʻenehana hoʻoheheʻe kiʻiʻoniʻoni lahilahi e wānana pololei i nā waiwai kiʻiʻoniʻoni lahilahi e pili ana i nā hoʻokomo kaʻina hana, nā mea i koho ʻia, a me nā waiwai substrate.
Ua komo ka mākeke semiconductor honua i kahi manawa hoihoi. ʻO ka noi no ka ʻenehana chip ua hoʻoikaika a hoʻopaneʻe i ka hoʻomohala ʻana o ka ʻoihana, a ke manaʻo nei e hoʻomau ka hemahema o kēia manawa no kekahi manawa. Hiki i nā ʻano o kēia manawa ke hoʻohālikelike i ka wā e hiki mai ana o ka ʻoihana ke hoʻomau nei kēia
ʻO ka ʻokoʻa nui ma waena o nā pihi graphene-based a me nā ʻāpana paʻa paʻa ʻo ia ka haku ʻana o nā electrodes. ʻOiai ua hoʻololi pinepine ʻia nā cathodes, hiki ke hoʻohana ʻia nā allotropes o ke kalapona e hana i nā anodes.
I nā makahiki i hala iho nei, ua hoʻokō wikiwiki ʻia ka Internet of Things ma kahi o nā wahi āpau, akā he mea nui loa ia i ka ʻoihana kaʻa uila.