Polysilicon wani abu ne mai mahimmanci wanda aka yi niyya. Yin amfani da hanyar sputtering magnetron don shirya SiO2 da sauran fina-finai na bakin ciki na iya sa kayan matrix su sami mafi kyawun gani, dielectric da juriya na lalata, wanda aka yi amfani da shi sosai a allon taɓawa, na gani da sauran masana'antu.
Tsarin simintin dogayen lu'ulu'u shine fahimtar ingantaccen ƙarfi na silicon ruwa daga ƙasa zuwa sama a hankali ta hanyar daidaita yanayin zafin na'urar a cikin filin zafi na tanderun ingot da kuma zubar da zafi na thermal rufi abu, da kuma ƙarfafa dogon lu'ulu'u gudun shine 0.8 ~ 1.2cm / h. A lokaci guda kuma, a cikin aiwatar da ƙarfafawar kwatance, ana iya gane tasirin abubuwan ƙarfe a cikin kayan siliki, yawancin abubuwan ƙarfe za a iya tsarkake su, kuma ana iya samar da tsarin hatsi na silicon polycrystalline.
Simintin gyare-gyaren polysilicon kuma yana buƙatar a sanya shi da gangan a cikin tsarin samarwa, don canza yawan ƙazanta masu karɓa a cikin narkar da siliki. Babban dopant na p-type simintin simintin gyare-gyare a cikin masana'antar shine silicon boron master alloy, wanda abun cikin boron ya kai kusan 0.025%. Adadin abubuwan kara kuzari an ƙaddara ta hanyar juriya na manufa na wafer silicon. Mafi kyawun tsayayya shine 0.02 ~ 0.05 Ω • cm, kuma madaidaicin ƙwayar boron shine kusan 2 × 1014cm-3. Duk da haka, ƙimar rarrabuwa na boron a cikin siliki shine 0.8, wanda zai nuna wani tasirin rarrabuwa a cikin tsarin ƙarfafawar shugabanci, cewa shi ne, ana rarraba sinadarin boron a cikin wani gradient a tsaye a tsaye na ingot, kuma resistivity a hankali yana raguwa daga kasa zuwa saman ingot.
Lokacin aikawa: Yuli-26-2022