Fim ɗin bakin ciki a kan maƙasudin da aka rufe shi ne nau'in kayan abu na musamman. A cikin takamaiman shugabanci na kauri, ma'auni yana da ƙanƙanta, wanda shine ƙananan ma'auni. Bugu da ƙari, saboda bayyanar da mu'amala da kauri na fim, ci gaban kayan yana ƙarewa, wanda ke sa bayanan fim ɗin da bayanan da aka yi niyya suna da kaddarorin gama gari daban-daban. Kuma makasudin shine galibi yin amfani da suturar sputtering na magnetron, editan Beijing Richmat zai kai mu mu gane. ka'ida da basirar sputtering shafi.
一, Ƙa'idar suturar sputtering
Sputtering gwaninta shi ne yin amfani da ion shelling manufa bayyanar, da manufa zarra an buga daga cikin sabon abu da aka sani da sputtering. Atom ɗin da aka ajiye akan saman ƙasa ana kiran su sputtering coating. Gabaɗaya, iskar gas ana samar da ita ta hanyar fitar da iskar gas, kuma ions masu kyau suna bama maƙasudin cathode da sauri a ƙarƙashin aikin filin lantarki, suna fitar da atom ko ƙwayoyin ƙwayoyin cuta. cathode manufa, da kuma tashi zuwa saman da substrate da za a ajiye a cikin wani fim. Kawai magana, sputtering shafi yana amfani da low matsa lamba inert gas haske fitarwa don samar da. ions.
Gabaɗaya, kayan aikin ɗorawa na fim ɗin sputtering suna sanye take da na'urorin lantarki guda biyu a cikin ɗakin zubar da ruwa, kuma makasudin cathode ya ƙunshi bayanan shafi. Gidan injin yana cike da iskar argon tare da matsa lamba na 0.1 ~ 10Pa. Haske mai haske yana faruwa a cathode a ƙarƙashin aikin mummunan ƙarfin lantarki na 1 ~ 3kV dc ko rf ƙarfin lantarki na 13.56mhz. Argon ions bombard da manufa surface da sa sputtered manufa atoms zuwa tara a kan substrate.
二, Sputtering shafi basira halaye
1、 Gudun tari mai sauri
Bambanci tsakanin babban gudun magnetron sputtering electrode da na gargajiya mataki biyu sputtering electrode shi ne cewa maganadisu an jera su a kasa da manufa, don haka rufaffiyar Magnetic filin na faruwa a saman da manufa.The lorentz ƙarfi a kan electrons ne zuwa ga tsakiya. na daban-daban Magnetic filin. Saboda tasirin mayar da hankali, electrons suna tserewa kaɗan. Filin maganadisu dabam-dabam yana zagayawa wurin da ake niyya, kuma na'urorin lantarki na biyu da aka kama a cikin filin maganadisu daban-daban suna karo da kwayoyin iskar gas akai-akai, wanda ke inganta yawan juzu'i na kwayoyin iskar gas.Saboda haka, babban gudun magnetron sputtering yana cinye ƙananan ƙarfi, amma zai iya samun babban tasiri mai tasiri, tare da halayen fitarwa mai kyau.
2. The substrate zafin jiki ne low
Babban gudun magnetron sputtering, kuma aka sani da ƙananan zafin jiki sputtering. Dalili kuwa shi ne, na'urar tana amfani da filaye a cikin sarari na filaye na lantarki waɗanda ke tsaye da juna. Na biyu electrons da ke faruwa a waje na manufa, a cikin juna. Karkashin aikin madaidaicin filin lantarki, an daure shi kusa da saman abin da ake niyya kuma yana tafiya tare da titin jirgin sama a cikin layi mai jujjuyawa, akai-akai yana bugun kwayoyin iskar gas don ionize kwayoyin iskar gas. maimaita kururuwa, har sai kuzarinsu ya kusan ɓacewa kafin su iya tserewa daga saman abin da aka nufa kusa da substrate. Domin makamashin electrons ya yi ƙasa sosai, zafin zafin da ake nufi da shi baya tashi da yawa. Wannan ya isa ya magance hauhawar yanayin zafin jiki wanda babban ƙarfin lantarki ya haifar da fashewar diode na yau da kullun, wanda ke kammala cryogenization.
3. A fadi da kewayon membrane Tsarin
Tsarin fina-finai na bakin ciki da aka samu ta hanyar zubar da ruwa da sanya allura ya sha bamban da wanda aka samu ta hanyar rage yawan daskararru. Ya bambanta da daskararrun da ake da su gabaɗaya, waɗanda aka rarraba a matsayin ainihin tsari iri ɗaya a cikin girma uku, fina-finan da aka ajiye a cikin lokacin iskar gas ana rarraba su azaman sifofi iri-iri. Fina-finan bakin ciki su ne columnar kuma ana iya bincika su ta hanyar bincikar microscopy na lantarki. Girman ginshiƙi na fim ɗin yana faruwa ne ta hanyar asalin maɗaukakiyar shimfidar wuri da ƴan inuwa a cikin fitattun sassa na substrate. Duk da haka, siffar da girman ginshiƙi sun bambanta sosai saboda yanayin zafin jiki, tarwatsewar atom ɗin da aka ɗora, binne ƙazanta na ƙazanta da abin da ya faru Angle na atom ɗin da ya faru dangane da saman ƙasa. A cikin kewayon zafin jiki mai yawa, fim ɗin bakin ciki yana da tsarin fibrous, babban yawa, wanda ya ƙunshi lu'ulu'u masu kyau na columnar, wanda shine tsarin musamman na fim ɗin sputtering.
Matsakaicin zubewa da saurin tari fim suma suna shafar tsarin fim ɗin. Saboda kwayoyin iskar gas suna da tasirin danne tarwatsawar atom a saman ma'auni, tasirin babban matsa lamba ya dace da raguwar zafin jiki a cikin samfurin. Sabili da haka, ana iya samun fina-finai maras kyau da ke dauke da hatsi mai kyau a babban matsin lamba. Wannan karamin girman girman fim ɗin ya dace da lubrication, juriya na lalacewa, taurin ƙasa da sauran aikace-aikacen inji.
4. Shirya abun da ke ciki daidai gwargwado
Haɗaɗɗiya, gaurayawan, gami, da sauransu, waɗanda suke da wahala a rufe su ta hanyar iska mai iska saboda tururin abubuwan da aka gyara sun bambanta ko kuma saboda sun bambanta lokacin zafi.Sputtering shafi hanyar ita ce sanya manufa surface Layer na atom Layer Layer by Layer. zuwa substrate, a cikin wannan ma'ana shine mafi kyawun ƙwarewar yin fim. Ana iya amfani da kowane irin kayan aiki a cikin samar da suturar masana'antu ta hanyar sputtering.
Lokacin aikawa: Afrilu-29-2022