Dole ne masu amfani da yawa sun ji game da samfurin maƙasudin sputtering, amma ka'idar sputtering manufa ya kamata ta kasance ba a sani ba. Yanzu, editan naMawadaci Na Musamman Mawadaci (RSM) yana raba ka'idodin sputtering magnetron na sputtering manufa.
Ana ƙara filin magnetic orthogonal da filin lantarki tsakanin madaidaicin manufa (cathode) da anode, iskar gas ɗin da ake buƙata (gabaɗaya Ar gas) an cika shi a cikin babban ɗakin injin, magnet ɗin dindindin yana samar da filin magnetic 250 ~ 350 Gauss akan. saman bayanan da aka yi niyya, kuma an kafa filin lantarki na orthogonal tare da babban filin lantarki.
Karkashin tasirin wutar lantarki, Ar gas yana ionized zuwa ions masu kyau da kuma electrons. Ana ƙara wani mummunan babban ƙarfin lantarki zuwa manufa. Tasirin filin maganadisu akan electrons da ke fitowa daga maƙasudin maƙasudi da yuwuwar ionization na haɓakar iskar gas, samar da babban plasma mai girma kusa da cathode. Karkashin tasirin Lorentz, Ar ions suna hanzarta zuwa saman da ake niyya kuma suna jefar da saman da ake niyya a cikin babban sauri, Atom ɗin da aka watsa akan maƙasudin suna bin ka'idar juzu'i kuma suna tashi daga saman da ake niyya zuwa ƙasa tare da babban kuzarin motsa jiki. don saka fina-finai.
Gabaɗaya sputtering Magnetron ya kasu kashi biyu: sputtering Tributary da RF sputtering. Ka'idar kayan aikin sputtering tributary abu ne mai sauƙi, kuma ƙimar sa kuma yana da sauri lokacin zubar da ƙarfe. Ana amfani da sputtering RF ko'ina. Baya ga sputtering kayan aiki, yana kuma iya sputter kayan da ba su da iko. A lokaci guda, yana kuma gudanar da reactive sputtering don shirya kayan oxides, nitrides, carbides da sauran mahadi. Idan mitar RF ta ƙaru, zai zama mai zubar da jini na microwave. Yanzu, resonance electron cyclotron (ECR) microwave sputtering plasma ana yawan amfani dashi.
Lokacin aikawa: Mayu-31-2022