Rufewar Vacuum yana nufin dumama da ƙafewar tushen ƙawancen ruwa a cikin injin motsa jiki ko sputtering tare da ƙarar ion bombardment, da ajiye shi a saman ƙasan don samar da fim mai Layer-Layer ko Multi-Layer. Menene ka'idar rufewa? Bayan haka, editan RSM zai gabatar mana da shi.
1. Vacuum evaporation shafi
Shafi na evaporation yana buƙatar nisa tsakanin ƙwayoyin tururi ko atom daga tushen evaporation da substrate da za a shafa ya zama ƙasa da matsakaicin matsakaicin hanyar kyauta na ragowar ƙwayoyin iskar gas a cikin ɗakin shafa, don tabbatar da cewa ƙwayoyin tururi na evaporation na iya isa saman ma'aunin ba tare da karo ba. Tabbatar cewa fim ɗin yana da tsabta kuma yana da ƙarfi, kuma ƙawancen ba zai oxidize ba.
2. Vacuum sputtering shafi
A cikin vacuum, lokacin da ions masu hanzari suka yi karo da daskararrun, a gefe guda, kristal ya lalace, a daya bangaren kuma, suna yin karo da kwayoyin halitta da suka hada da crystal, sannan a karshe kwayoyin halitta ko kwayoyin halitta a saman daskararrun. sputter waje. Ana fentin kayan da aka zubar a kan ma'aunin don samar da fim na bakin ciki, wanda ake kira vacuum sputter plating. Akwai hanyoyi da yawa na sputtering, daga cikin abin da diode sputtering shi ne na farko. Dangane da maƙasudai daban-daban na cathode, ana iya raba shi zuwa halin yanzu kai tsaye (DC) da babban mitar (RF). Adadin kwayoyin zarra da aka watsa ta hanyar yin tasiri akan saman da aka yi niyya tare da ion ana kiran ƙimar sputtering. Tare da babban sputtering kudi, da fim gudun samuwar yana da sauri. Yawan sputtering yana da alaƙa da makamashi da nau'in ions da nau'in kayan da aka yi niyya. Gabaɗaya magana, ƙimar sputtering yana ƙaruwa tare da haɓakar kuzarin ion ɗan adam, kuma yawan sputtering na karafa masu daraja ya fi girma.
Lokacin aikawa: Jul-14-2022