Dole ne mu saba da manufa a yanzu, yanzu kasuwar manufa kuma tana karuwa, mai zuwa shine babban aikin sputtering manufa wanda edita daga RSM ya raba.
Tsabta
Tsabtace kayan da aka yi niyya shine ɗayan manyan ma'auni na ayyuka, saboda tsabtar kayan da aka yi niyya yana da babban tasiri akan aikin fim ɗin bakin ciki. Koyaya, a aikace-aikacen aikace-aikacen, ƙayyadaddun buƙatun tsarkaka na kayan manufa ba iri ɗaya bane. Misali, tare da saurin ci gaban masana'antar microelectronics, girman guntu siliki an haɓaka daga 6 ″, 8 “zuwa 12″, kuma an rage girman wayoyi daga 0.5um zuwa 0.25um,0.18um ko ma 0.13um. A baya can, da tsarki na 99.995% manufa abu iya saduwa da aiwatar da bukatun na 0.35umIC. Tsabtace kayan da aka yi niyya shine 99.999% ko ma 99.9999% don shirye-shiryen layin 0.18um.
Abubuwan da ke cikin najasa
Rashin ƙazanta a cikin maƙasudi mai ƙarfi da iskar oxygen da tururin ruwa a cikin pores sune manyan tushen gurɓataccen gurɓataccen fim. Kayayyakin manufa don dalilai daban-daban suna da buƙatu daban-daban don abun ciki na ƙazanta daban-daban. Misali, tsantsar aluminium da maƙasudin gami na aluminium da ake amfani da su a masana'antar semiconductor suna da buƙatu na musamman don abun ciki na ƙarfe na alkali da abubuwan rediyoaktif.
Yawan yawa
Domin rage porosity a cikin manufa mai ƙarfi da kuma inganta aikin fim ɗin sputtering, ana buƙatar yawan yawan maƙasudin. Yawan maƙasudin yana rinjayar ba kawai ƙimar sputtering ba har ma da kayan lantarki da kayan gani na fim. Mafi girman girman maƙasudin, mafi kyawun aikin fim. Bugu da ƙari, haɓaka ƙima da ƙarfin abin da ake nufi yana sa manufa ta fi dacewa da yanayin zafi a cikin tsarin sputtering. Maɗaukaki kuma ɗaya ne daga cikin mahimmin maƙasudin ayyuka na manufa.
Girman hatsi da rabon hatsi
Makasudin yawanci shine polycrystalline tare da girman hatsi daga micrometer zuwa millimeter. Don maƙasudin guda ɗaya, ƙimar sputtering na manufa tare da ƙananan hatsi ya fi sauri fiye da na manufa tare da manyan hatsi. Rarraba kauri na fina-finai da aka ajiye ta hanyar sputtering manufa tare da ƙaramin girman girman hatsi (rarrabuwar rini) ya fi iri ɗaya.
Lokacin aikawa: Agusta-04-2022