Kamar yadda kowa ya sani, ana yawan amfani da ƙashin ƙura da ion sputtering a cikin shafe-shafe. Menene bambanci tsakanin shafi evaporation da sputtering shafi? Na gaba, ƙwararrun ƙwararrun masana daga RSM za su raba tare da mu.
Vacuum evaporation shafi shine don dumama kayan da za a fitar da su zuwa wani zafin jiki ta hanyar dumama juriya ko katako na lantarki da bam ɗin laser a cikin yanayi tare da injin injin da bai ƙasa da 10-2Pa ba, don haka ƙarfin girgizar thermal na ƙwayoyin cuta ko kwayoyin halitta a cikin kayan sun zarce karfin dauri na saman, ta yadda adadi mai yawa na kwayoyin halitta ko atoms su kaurace ko kuma sublimate, kuma su yi hazo kai tsaye. substrate don samar da fim. Ion sputtering shafi yana amfani da babban motsi na tabbataccen ions da aka haifar da fitarwar iskar gas a ƙarƙashin aikin filin lantarki don bombard manufa a matsayin cathode, don haka ƙwayoyin cuta ko ƙwayoyin cuta a cikin maƙasudin tserewa da hazo zuwa saman kayan aikin da aka yi da su don samarwa. fim din da ake bukata.
Hanyar da aka fi amfani da ita na suturar ƙurar ƙura shine juriya dumama, wanda yana da fa'idodin tsari mai sauƙi, ƙananan farashi da aiki mai dacewa; Rashin hasara shi ne cewa bai dace da karafa masu jujjuyawa ba da kayan aikin dielectric mai tsayin zafi. Electron katako dumama da Laser dumama iya shawo kan shortcomings na juriya dumama. A cikin dumama katako na lantarki, ana amfani da igiyar wutar lantarki da aka mayar da hankali wajen dumama kayan da aka yi bam ɗin kai tsaye, kuma makamashin motsa jiki na katakon lantarki ya zama makamashin zafi, wanda ke sa kayan ya ƙafe. Dumama Laser yana amfani da Laser mai ƙarfi a matsayin tushen dumama, amma saboda tsadar Laser mai ƙarfi, ana iya amfani dashi a cikin ƴan dakunan bincike kaɗan a halin yanzu.
Fasahar watsawa ta sha bamban da fasahar fitar da iska. "Sputtering" yana nufin al'amarin da ya caje barbashi bama-bamai kan daskararrun saman (manufa) da kuma yin daskararrun kwayoyin halitta ko kwayoyin halitta suna harbawa daga saman. Yawancin barbashi da ake fitarwa suna cikin yanayin atom, wanda galibi ake kiransa atoms sputtered. Barbashi da aka watsar da aka yi amfani da su don jefa bama-bamai na iya zama electrons, ions ko tsaka tsaki. Saboda ions suna da sauƙin haɓakawa a ƙarƙashin filin lantarki don samun makamashin motsin da ake buƙata, yawancinsu suna amfani da ions azaman barbashi da bam. Tsarin sputtering yana dogara ne akan fitarwa mai haske, wato, ions sputtering suna fitowa daga fitar da iskar gas. Daban-daban fasahohin sputtering suna ɗaukar yanayin fitarwa mai haske daban-daban. DC diode sputtering yana amfani da fitarwa mai haske na DC; Triode sputtering shine fitarwa mai haske wanda ke goyan bayan cathode mai zafi; RF sputtering yana amfani da fitarwa mai haske na RF; Magnetron sputtering fitarwa ne mai haske wanda filin maganadisu na shekara-shekara ke sarrafawa.
Idan aka kwatanta da murfin ƙawancen iska, suturar sputtering yana da fa'idodi da yawa. Alal misali, kowane abu yana iya tofawa, musamman abubuwa da mahadi tare da babban narkewa da ƙananan tururi; Adhesion tsakanin sputtered fim da substrate yana da kyau; Babban nauyin fim; Ana iya sarrafa kauri na fim kuma sake maimaitawa yana da kyau. Rashin hasara shi ne cewa kayan aiki yana da rikitarwa kuma yana buƙatar na'urori masu ƙarfin lantarki.
Bugu da kari, hadewar hanyar evaporation da hanyar sputtering shine ion plating. Amfanin wannan hanyar shine cewa fim ɗin da aka samu yana da ƙarfi mai ƙarfi tare da substrate, babban adadin ajiya da girman fim.
Lokacin aikawa: Yuli-20-2022