A halin yanzu, kusan dukkanin manyan maƙasudin ƙarfe na ƙarfe na ƙarfe mai tsafta da ake buƙata da masana'antar IC ke buƙata, manyan kamfanoni na ƙasashen waje da yawa ne suka mamaye su. Dukkanin makasudin jan karfe da masana'antar IC na cikin gida ke bukata a shigo da su, wanda ba kawai tsada ba ne, har ma da rikitarwa a cikin hanyoyin shigo da kayayyaki don haka, Sin na bukatar hanzarta inganta ci gaba da tabbatar da ma'aunin tozarta tagulla (6N). . Bari mu kalli mahimman mahimman bayanai da matsaloli a cikin haɓakar maƙasudin zubewar tagulla (6N).
1,Haɓaka kayan aikin tsafta na matsananci
Fasahar tsarkakewa na karafa masu tsafta na Cu, Al da Ta a kasar Sin ya yi nisa da na kasashen da suka ci gaba a masana'antu. A halin yanzu, yawancin karafa masu tsafta waɗanda za a iya samarwa ba za su iya biyan buƙatun ingantattun hanyoyin da'irori don sputtering hari bisa ga al'ada duk hanyoyin bincike na masana'antu. Adadin abubuwan da aka haɗa a cikin maƙasudin ya yi yawa ko kuma ba a rarraba ba daidai ba. Ana yin barbashi sau da yawa akan wafer lokacin sputtering, wanda ke haifar da gajeriyar da'ira ko buɗaɗɗen da'irar haɗin kai, wanda ke yin tasiri sosai ga aikin fim ɗin.
2,Haɓaka fasahar shirye-shiryen tagulla na jan ƙarfe
Haɓaka fasahar shirye-shirye na sputtering jan ƙarfe ya fi mai da hankali kan abubuwa uku: girman hatsi, kula da daidaitawa da daidaito. Masana'antar semiconductor tana da mafi girman buƙatu don ɓarna maƙasudi da ƙafewar albarkatun ƙasa. Yana da matukar tsauraran bukatu don sarrafa girman hatsin saman da madaidaicin crystal na manufa. Dole ne a sarrafa girman hatsin da aka yi niyya a 100μ M da ke ƙasa, sabili da haka, kula da girman hatsi da kuma hanyoyin bincike na daidaituwa da ganowa suna da matukar muhimmanci ga ci gaban maƙasudin ƙarfe.
3,Ci gaban bincike dagwaji fasaha
Babban tsarki na manufa yana nufin rage ƙazanta. A baya, an yi amfani da plasma haɗe-haɗe tare da inductively (ICP) da atom absorption spectrometry don tantance ƙazanta, amma a cikin 'yan shekarun nan, nazarin ingancin fitarwa mai haske (GDMS) tare da mafi girman hankali an yi amfani da shi a hankali azaman ma'auni. hanya. Hanyar RRR mai saura juriya ana amfani da ita musamman don tantance tsaftar wutar lantarki. Ƙaddamar da ƙayyadaddun sa shine kimanta tsabtar ƙarfe ta tushe ta hanyar auna matakin tarwatsawar ƙazanta na lantarki. Domin shine don auna juriya a zafin jiki da ƙananan zafin jiki, yana da sauƙi don ɗaukar lambar. A cikin 'yan shekarun nan, don bincika ainihin karafa, bincike kan tsaftar ultra-high yana aiki sosai. A wannan yanayin, ƙimar RRR ita ce hanya mafi kyau don kimanta tsabta.
Lokacin aikawa: Mayu-06-2022