Wani sabon bincike a cikin mujallar Diamond and Materials Materials mayar da hankali a kan etching na polycrystalline lu'u-lu'u tare da FeCoB da dai sauransu don samar da alamu. Sakamakon waɗannan ingantattun sabbin fasahohi, ana iya samun saman lu'u-lu'u ba tare da lalacewa ba kuma tare da ƙarancin lahani.
Bincike: Zaɓaɓɓen zaɓi na lu'u-lu'u a cikin ƙasa mai ƙarfi ta amfani da FeCoB tare da ƙirar hoto. Hoton hoto: Bjorn Wilezic/Shutterstock.com
Ta hanyar ingantaccen tsarin watsawa, FeCoB nanocrystalline fina-finai (Fe: Co: B = 60:20:20, rabon atomic) na iya cimma maƙasudin lattice da kawar da lu'u-lu'u a cikin ƙaramin tsari.
Lu'u-lu'u suna da nau'ikan sinadarai na musamman da halaye na gani, da kuma babban ƙarfi da ƙarfi. Matsanancin ƙarfinsa shine muhimmin tushen ci gaba a cikin ingantattun mashin ɗin (fasaha na juya lu'u-lu'u) da kuma hanyar zuwa matsananciyar matsin lamba a cikin kewayon ɗaruruwan GPa.
Rashin rashin ƙarfi na sinadarai, dorewar gani da ayyukan nazarin halittu suna haɓaka yuwuwar ƙira na tsarin da ke amfani da waɗannan halayen aikin. Diamond ya yi suna a fannin injiniyoyi, na'urorin gani, na'urori masu auna firikwensin da sarrafa bayanai.
Domin ba da damar aikace-aikacen su, haɗin lu'u-lu'u da tsarin su yana haifar da matsaloli na bayyane. Reactive ion etching (RIE), plasma inductively coupled (ICP), da electron biam induced etching su ne misalan tsarin tsarin da ke amfani da fasahar etching (EBIE).
Hakanan ana ƙirƙira sifofin lu'u-lu'u ta amfani da fasahar sarrafa Laser da ion beam (FIB). Manufar wannan dabarar ƙirƙira ita ce haɓaka lalata da kuma ba da damar yin ƙima a kan manyan wurare a cikin tsarin samarwa masu zuwa. Waɗannan matakai suna amfani da etchants na ruwa (plasma, gas, da mafita na ruwa), wanda ke iyakance ma'aunin ƙwaƙƙwalwar lissafi.
Wannan aikin mai ban sha'awa yana nazarin zubar da abu ta hanyar samar da tururin sinadarai kuma ya haifar da lu'u-lu'u polycrystalline tare da FeCoB (Fe: Co: B, 60:20:20 atomic percent) a saman. An biya babban hankali ga ƙirƙirar samfuran TM don daidaitaccen etching na sikelin sikelin a cikin lu'u-lu'u. Lu'u-lu'u da ke ƙasa an haɗa shi da nanocrystalline FeCoB ta hanyar magani mai zafi a 700 zuwa 900 ° C na minti 30 zuwa 90.
Mummunan Layer na samfurin lu'u-lu'u yana nuna ƙananan ƙirar polycrystalline. Ƙaunar (Ra) a cikin kowane nau'i na musamman shine 3.84 ± 0.47 nm, kuma jimillar rashin ƙarfi ya kasance 9.6 ± 1.2 nm. Rashin ƙarfi (a cikin ƙwayar lu'u-lu'u ɗaya) na ƙirar ƙarfe na FeCoB da aka dasa shine 3.39 ± 0.26 nm, kuma tsayin Layer shine 100 ± 10 nm.
Bayan annealing a 800 ° C na 30 min, kauri na karfe ya karu zuwa 600 ± 100 nm, kuma yanayin yanayin (Ra) ya karu zuwa 224 ± 22 nm. A lokacin annealing, carbon atoms suna yaduwa a cikin Layer FeCoB, yana haifar da karuwa a girman.
Samfura guda uku tare da kauri na FeCoB 100 nm an yi zafi a yanayin zafi na 700, 800, da 900 ° C, bi da bi. Lokacin da kewayon zafin jiki ya kasance ƙasa da 700 ° C, babu wani muhimmin haɗin gwiwa tsakanin lu'u-lu'u da FeCoB, kuma an cire abubuwa kaɗan bayan maganin hydrothermal. An haɓaka cire kayan aiki zuwa yanayin zafi sama da 800 ° C.
Lokacin da zafin jiki ya kai 900 ° C, ƙimar etching ya karu sau biyu idan aka kwatanta da zafin jiki na 800 ° C. Koyaya, bayanin martabar yankin ya sha bamban sosai da na jeri na etch (FeCoB).
Tsari yana nuna hangen nesa na ƙaƙƙarfan yanayi mai ƙirƙira don ƙirƙirar ƙirƙira: Zaɓar yanayi mai ƙarfi na lu'u-lu'u ta amfani da FeCoB mai ƙirar hoto. Hoton hoto: Van Z. da Shankar MR et al., Diamonds da Abubuwan da suka danganci.
Samfuran FeCoB 100 nm kauri akan lu'u-lu'u an sarrafa su a 800 ° C na mintuna 30, 60, da 90, bi da bi.
An ƙaddara ƙarancin (Ra) na yankin da aka zana a matsayin aikin lokacin amsawa a 800 ° C. Taurin samfuran bayan annealing na 30, 60 da 90 mintuna shine 186 ± 28 nm, 203 ± 26 nm da 212 ± 30 nm, bi da bi. Tare da zurfin etch na 500, 800, ko 100 nm, rabo (RD) na roughness na yanki da aka zana zuwa zurfin etch shine 0.372, 0.254, da 0.212, bi da bi.
Ƙarƙashin ƙaƙƙarfan yanki ba ya ƙaruwa sosai tare da ƙara zurfin etching. An gano cewa zafin da ake buƙata don amsawa tsakanin lu'u-lu'u da sauran abubuwan HM ya wuce 700 ° C.
Sakamakon binciken ya nuna cewa FeCoB na iya cire lu'u-lu'u yadda ya kamata a cikin sauri fiye da ko dai Fe ko Co kadai.
Lokacin aikawa: Agusta-31-2023