1. Hanyar sputtering Magnetron:
Magnetron sputtering za a iya raba zuwa DC sputtering, matsakaici mitar sputtering da RF sputtering.
A. DC sputtering samar da wutar lantarki ne mai arha da yawa ajiya film ne matalauta. Gabaɗaya, ana amfani da batirin photothermal na gida da sirara-fim tare da ƙarancin kuzari, kuma maƙasudin watsawa shine manufa ta ƙarfe.
B. Ƙarfin sputter na RF yana da girma, kuma maƙasudin sputtering na iya zama manufa mara amfani ko manufa.
C. Maƙasudin mitar sputtering matsakaici na iya zama manufa ta yumbu ko manufa ta ƙarfe.
2. Rarrabewa da aikace-aikace na maƙasudin sputtering
Akwai nau'ikan maƙasudai iri-iri, kuma hanyoyin rarraba niyya su ma sun bambanta. Dangane da sifar, an raba su zuwa dogon manufa, murabba'i da maƙasudin zagaye; Dangane da abun da ke ciki, ana iya raba shi zuwa maƙasudin ƙarfe, manufa gami da maƙasudin fili na yumbu; Dangane da filayen aikace-aikacen daban-daban, ana iya raba shi zuwa maƙasudin yumbu masu alaƙa da semiconductor, rikodin maƙasudin yumbu na matsakaici, maƙasudin yumbu, da sauransu. Ana amfani da maƙasudin zube a masana'antar lantarki da bayanai, kamar masana'antar adana bayanai. A cikin wannan masana'antar, ana amfani da maƙasudin sputtering don shirya samfuran fim na bakin ciki masu dacewa (hard disk, shugaban maganadisu, faifan gani, da sauransu). A halin yanzu. Tare da ci gaba da ci gaban masana'antar bayanai, buƙatar yin rikodin maƙasudin yumbu a kasuwa yana ƙaruwa. Bincike da samar da rikodi na matsakaiciyar manufa ya zama abin da aka mayar da hankali sosai.
Lokacin aikawa: Mayu-11-2022