Kwanan nan, abokai da yawa sun yi tambaya game da halayen molybdenum sputtering hari. A cikin masana'antar lantarki, don inganta haɓakar sputtering da kuma tabbatar da ingancin fina-finai da aka adana, menene abubuwan da ake buƙata don halaye na maƙasudin sputtering molybdenum? Yanzu masana fasaha daga RSM za su bayyana mana shi.
1. Tsafta
Babban tsabta shine ainihin abin da ake buƙata na maƙasudin sputtering molybdenum. Mafi girman tsarkin molybdenum manufa, mafi kyawun aikin fim ɗin sputtered. Gabaɗaya, tsarkin maƙasudin sputtering molybdenum ya kamata ya zama aƙalla 99.95% (ƙasassun juzu'i, iri ɗaya a ƙasa). Koyaya, tare da ci gaba da haɓaka girman girman gilashin gilashin a cikin masana'antar LCD, ana buƙatar tsayin wayoyi don haɓakawa kuma ana buƙatar layin layi don zama bakin ciki. Don tabbatar da daidaiton fim ɗin da ingancin wayoyi, ana kuma buƙatar haɓaka tsaftar maƙasudin sputtering molybdenum daidai da haka. Sabili da haka, bisa ga girman gilashin gilashin da aka zubar da kuma yanayin amfani, ana buƙatar tsarkakewar molybdenum sputtering manufa don zama 99.99% - 99.999% ko ma mafi girma.
Molybdenum sputtering manufa ana amfani da matsayin cathode tushen sputtering. Najasa a cikin m da iskar oxygen da tururin ruwa a cikin pores sune manyan tushen gurɓatawar fina-finai da aka ajiye. Bugu da ƙari, a cikin masana'antun lantarki, saboda ions ions na alkali (Na, K) suna da sauƙi don zama ions na hannu a cikin rufin rufin, aikin na'urar na asali ya ragu; Za a saki abubuwa kamar su uranium (U) da titanium (TI) α X-ray, wanda ke haifar da rugujewar na'urori masu taushi; Iron da nickel ions za su haifar da ɗigon mu'amala da haɓaka abubuwan oxygen. Sabili da haka, a cikin tsarin shirye-shiryen molybdenum sputtering manufa, waɗannan abubuwa na ƙazanta suna buƙatar a sarrafa su sosai don rage abun ciki a cikin manufa.
2. Girman hatsi da rarraba girman
Gabaɗaya, maƙasudin sputtering molybdenum shine tsarin polycrystalline, kuma girman hatsi zai iya zuwa daga micron zuwa millimeters. Sakamakon gwaji ya nuna cewa yawan zubar da ƙwayar hatsi mai kyau ya fi sauri fiye da na maƙasudin hatsi; Don maƙasudi tare da ƙananan ƙananan ƙwayar hatsi, rarraba kauri na fim ɗin da aka ajiye shi ma ya fi daidai.
3. Crystal fuskantarwa
Saboda maƙasudin atom ɗin yana da sauƙi a fifita su tare da tsarin tsarin mafi kusa na atom a cikin jagorar hexagonal yayin sputtering, don cimma mafi girman ƙimar sputtering, yawan sputtering yana ƙaruwa ta hanyar canza tsarin crystal na manufa. Har ila yau, jagorar crystal na manufa yana da tasiri mai girma akan kauri iri ɗaya na fim ɗin sputtered. Sabili da haka, yana da matukar muhimmanci a sami wani tsari mai ma'ana na kristal don aiwatar da sputtering na fim.
4. Densification
A cikin aiwatar da suturar sputtering, lokacin da aka harba maƙasudin sputtering tare da ƙarancin ƙarancin yawa, iskar gas ɗin da ke cikin ramukan ciki na abin da ake nufi ya fito ba zato ba tsammani, wanda ya haifar da ɓarke na manyan nau'ikan ɓarna ko ɓarna, ko kuma an lalata kayan fim ɗin. ta hanyar electrons na biyu bayan samuwar fim, wanda ke haifar da fashewar barbashi. Bayyanar wadannan barbashi zai rage ingancin fim din. Domin rage pores a cikin manufa mai ƙarfi da haɓaka aikin fim, ana buƙatar maƙasudin sputtering gabaɗaya don samun babban yawa. Don maƙasudin sputtering molybdenum, ƙarancin dangi ya kamata ya zama fiye da 98%.
5. Daurin manufa da chassis
Gabaɗaya, dole ne a haɗa maƙasudin sputtering molybdenum tare da iskar oxygen kyauta jan ƙarfe (ko aluminum da sauran kayan) chassis kafin sputtering, ta yadda thermal conductivity na manufa da chassis yana da kyau yayin aikin sputtering. Bayan dauri, ultrasonic dubawa dole ne a za'ayi don tabbatar da cewa wadanda ba bonding yankin ne kasa da 2%, don saduwa da bukatun na high-ikon sputtering ba tare da fadowa.
Lokacin aikawa: Jul-19-2022