Factory Price Iron Silicon Fesi Sputtering Target - Tungsten Silicide – Rich
Factory Price Iron Silicon Fesi Sputtering Target - Tungsten Silicide – Rich Detail:
Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.
Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.
Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.
ITEM | Chemical composition | |||||
Element | W | C | P | Fe | S | Si |
Content(wt%) | 76.22 | 0.01 | 0.001 | 0.12 | 0.004 | Balance |
Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.
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Our focus on should be to consolidate and enhance the quality and repair of present products, in the meantime constantly establish new products to meet unique customers' requires for Factory Price Iron Silicon Fesi Sputtering Target - Tungsten Silicide – Rich , The product will supply to all over the world, such as: Vancouver, Macedonia, South Africa, We welcome you to visit our company, factory and our showroom displayed various products that will meet your expectation, meanwhile, it is convenient to visit our website, our sales staff will try their efforts to provide you the best service. If you need more information, please do not hesitate to contact us by E-mail or telephone.
By Elma from Romania - 2018.11.22 12:28
Sales manager is very enthusiastic and professional, gave us a great concessions and product quality is very good,thank you very much!
By Ophelia from Italy - 2017.11.20 15:58